Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mounting thread 2-LA Mounting hole EA C D 2-P Attachment mounting thread 2-FD through Supply port (2 pcs.)

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

(2color) 3 wire(PNP) 12V 2 wire Water resistant (2 color) With timer Grommet 3 wire(NPN) 5V, 12V IC Diagnostic output (2 color) 4 wire (NPN) Latch with diagnostic output (2 color) * Lead wire length 0.5m : 3m : L 5m : Z None: N e.g.)

CJ2Q

) Relay PLC 3 wire (PNP) 24V Yes H7BWV 2 wire 12V Water resistant (2 color) Grommet F7BA H7BA 3 wire (NPN) With timer With diagnostic output (2 color) F7NT F79F H7NF IC 5V, 12V 4 wire (NPN) Latch with diagnostic output (2 color) F7LF H7LF Lead wire length 0.5m e.g.)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

EXxx-OMZ0016

Wireless Wireless Communication channel WEB distance Protocol Base Remote select function function (F.C.S.) 1 EXW1 EXW1 Up to 100 m V.1.0/V.2.0*1 Available*2 2 EXW1 EXW1+EX600 *3 V.1.0 NA 3 EXW1 EX600 Up to 10 m V.1.0 NA 4 EX600 EXW1 Up to 10 m V.1.0 NA Available*4 5 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*4 6*5 EX600 EX600 Up to 10 m V.1.0 NA Available *1: For more details, check

V100

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

Table of Contents

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc

V

Applicable Series Base Model Piping Applications Piping Port Size Base Valve Stations 2 C VV5QZ 1(P), 3/5(R) 4(A), 2(B) Weight g Rc(PT) C3(3.2) Top 2 Stations: 64 VQZ120 2 VQZ1000 VV5QZ121/8 C4(4) Addition VQZ121 to S E R I E S C6(6) per 20 1 VQZ1000 2 VQZ2000 3 VQZ3000 M5(M5Thread) Station: 18 Stations Rc(PT) C4(4) Top 2 Stations: 86 VQZ220 2 VQZ2000 VV5QZ221/8 C6(6) Addition VQZ221 to

SYJ3000/5000/7000

fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36 0.35 0.35 0.22 0.24 0.29 0.12 0.16 0.21

SX

stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch fitting for 6 C6 One-touch fitting

VFR

/4 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR521 -E, VFR521 -D(Z) 3 position closed center: VFR531 -E, VFR531 -D(Z) 3 position exhaust center: VFR541 -E, VFR541 -D(Z) 3 position pressure center: VFR551 -E, VFR551 -D(Z) [For Rc 3/4] Rc 1/8 External pilot port 209 100 116 [134] 47.5 [43.5] Rc 1/8 (PE port) 9 [20] Rc 1/8 (PE port) 8 Manual override (Non-locking) 2 11 [13] A B 2 [

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

One-touch fitting: SYJ5120-l llG H C4 C6 10 10.6 2-M3 X 0.5 (Mounting screw) 3.5 4 11 2-2.6 15 (Mounting holes) 19.5 58.2 16 3.5 62.3 (GZ, GS: 63.3) [63.3] A B 10.6 2-One-touch fitting (A, B port) Apricable tube C4: T0425 C6: T0604 R1 P C4: (3) C6: (3.2) 32.3 R2 21 5-M5 X 0.8 (Piping port) [ ] for AC Other dimensions are the same as the grommet style