Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F02 (G1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: With Calibration Certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 2 to 100 (50), Accessory: None, Option: None, Analog Current Output(mA): None

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

2

AD17-2-A AD27-2-A AD37-2-A AD47-2-A With level gauge AD37-8-A AD47-8-A Automatic discharge Note) Normally open (N.O.) AD38-2-A AD48-2-A With level gauge AD38-8-A AD48-8-A (Auto drain) Note) Minimum operating pressure: N.O. type0.1 MPa (AD38-A, AD48-A); N.C. type0.1 MPa (AD17-A, AD27-A) and 0.15 MPa (AD37-A, AD47-A).

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

CL

B With rod boot Z + 1/2 stroke A Rc BP lock-up port Unlocked when pressurized B Rc BP lock-up port Unlocked when pressurized 2-Rc P Width across flats KA Z + l + 1/2 stroke TDe8 EB EA D e Width across flats B1 l h + l ZZ + l + Stroke S + Stroke ZZ + Stroke 125 to 160 With rod boot Z + l + 1/2 stroke Z + 1/2 stroke A Rc BP lock-up port Unlocked when pressurized B Rc BP lock-up port 2-Rc

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

CLK1

Symbol 32 40 50 63 1 pc. 2 pcs. "n" pcs. Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx.

Rotary Actuator

4 types Combination of applicable chart A 1 A 2 C 8 C59 Chart 1, 2, 7 A 2 A24 C10 C60 Chart 1, 2, 7 Combination is available only when all the conditions are fulfilled in the combination chart.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

1.14 1.24 1.36 1.61 Bore 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") 6-14-23 24 Series NCM Double Acting/Single Rod/Band Mounting Auto Switch Mounting Position and Mounting Height D-H7/H7W/H7F/H7BAL D-C7/C8 HS HS 0.63 0.63 SMC SMC A A 1.02 B B 1.14 (1.42) ( ): D-H7LF D-G59/K59 D-B5/B6/B59W HS HS 0.96 0.96 SMC SMC 1.30 A A B B 1.30 D-H7C D-C73C/C80C Courtesy

CNG

9 Snap ring Clip B 25, 32 only Stainless steel Stainless steel %6 @0 Cushion seal A Steel ball A Urethane Carbon steel @1 Steel ball B Same as cushion seal A Carbon steel %7 Cushion seal B Urethane except 20, 25 standard stroke @2 Tooth ring Stainless steel %8 @3 Cushion ring gasket A Bumper NBR Urethane @4 C type retaining ring for taper ring Carbon steel Same as cushion ring gasket A except

Clamp Cylinder with Lock Series CLK1

Symbol 32 40 50 63 1 pc. 2 pcs. "n" pcs. Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx.

High Power Cylinder:

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

also on the sensor., Fast response: either 50 ms, 0.5s, 1, or 2s can be chosen., Easy connection and removal of wiring., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, 55 lb

MLGC

Note 2) Common with cushion packing A except for standard stroke of 20 and 25.

MGC

, B8 D-B73C D-B80C D-G7, K7 D-K79C D-B5, B6 D-G5lW D-K59W D-G5BAL D-G59F D-H7lW D-H7lF D-H7BAL D-C7, C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-C73C D-C80C D-B59W D-H7 D-H7C Bore size Hs Hs Hs A 21.5 (29.5) A B 20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18