Micro Mechanical Valve Series VM1000

F.O.F. 6.5 mm 1.7 mm 4.8 mm 21 N VHK 25 28 2 x 3.2 mounting hole 5 x 1/8 VH Push button (Flush) VZM550-01-33 Panel mounting hole VHS 38 23 T.T. O.T. P.T. VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

CJ5-S

) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 0.1 0.3 NX + 0.2 0 A1 U1 RE A B L1

AC

Check valve AKM3000 JIS symbol Model Specifications Effective area (mm2) 28 55 111 AKM2000 AKM3000 AKM4000 Model Diverging port size Applicable model A B C D E AC2000, AC2010 AC2500, AC2510 AC3000, AC3010 AKM2000 40 40 28 11 11 1/8, 1/4 Note) Use this check valve when diverging on the supply side of AL. IN/OUT port is not made for thread piping.

VFR

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A Material Steel plate Steel plate NBR NBR NBR NBR NBR No. Description Material Part no. AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

Basic type / Direct mount type Series CY3B/CY3R

56 64 M2 26 85 96 M3 28 56 64 Model CY1H10 CY1H15 CY1H20 Model CY1H25 CY1HT25 CY1HT32 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm CY1S 10 10 2 2.5 3 4 5 3 4 5 CY1H10 CY1L M3 2 CY1H10 1.5 1 1 CY1H 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s CY1F Graph (3) Graph (2) CYP Moment generated by the workpiece weight even when the cylinder

Dual Rod Cylinder Series CXSJ/CXS

22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Electric Actuator

120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo

Guide Cylinder Series MGG

29.5 30.5 30 30 34 24.5 27.5 26 33.5 23 (32) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 27 (36) 40 40 35 37.5 38 36.5 34.5 35.5 34.5 35 39 29.5 32 31 38 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 32 (36) 50 50 40.5 43 43.5 43.5 41.5 42.5 40 42 46 36.5 39.5 38 43.5 28 (40) 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Axial piping

CA2

Cotter pin size CJ1 Flat washer 16 M14 x 1.5 13 55.5 3 x 18l Polished round 12 22 25 24 12 55 38 40 Y-04D +0.3 +0.1 CJP CJ2 16 M18 x 1.5 15 55.5 3 x 18l Polished round 12 27 27 28 12 60 38 50, 63 Y-05D +0.3 +0.1 CM2 28 M22 x 1.5 19 76.5 4 x 25l Polished round 18 37 28 36 18 71 55 80 Y-08D +0.3 +0.1 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

10

x 2 28.5 34 25 +0.084 0 32 0.10 0.30 Y-03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20

CXS

36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

Vacuum Module Series ZX

(For replacement) ZH Philips screw (M2.5 x 28) How to order (1) Valve unit (Supply valve: N.C.)

24

52 128 200 300 42 54 92 128 178 100 M12 x 1.75 24 28 100 17.5 32.5 89 64 210 90 236 188 210 166 48 72 148 220 320 35 47 85 121 171 124 M14 x 2.0 28 11 MGPL (Ball bushing) MGPA (High precision ball bushing) A, DB, E Dimensions MGPM (Slide bearing) A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E 50 st or less Over 50 st 200 st or less Over 200 st 50 st or less Over 50 st 200 st or less

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

INSTALLATION 21 to 28 2.1 Installation direction and clearances . 23 2.2 Keep out foreign materials . 24 2.3 Encoder cable stress . 25 2.4 SSCNET III cable laying . 25 2.5 Inspection items . 27 2.6 Parts having service lives . 28 3.

Hydraulic Filters

28 28 28 28 G 9 9 9 9 9 9 9 9 Weight (kg)* E 47 47 52 58 58 63 Z 2.8 2.8 2.8 5.3 5.3 5.4 Port size Port size Port size 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7

Compact

27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

ZP

43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82 16.5 28 43 65 174 227 4.5 ZPX HJ-B01-A22 (With buffer) 100 125 Hexagon width across flats 30 Hexagon width across flats 17 Width across flats 19 Hexagon width across flats 21 (mm) Model A 100 ZPX100HJ25-B01-A22 D 186 ZPX100HJ50-B01-A22 ZPX100HJ75-B01-A22 ZPX100HJ100-B01

Metal Seal/Rubber Seal Series VQ Body Ported

For details, refer to page 2-4-28. Note 2) For details, refer to page 2-4-29.