Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators DI BJ DH DJ 2 x JF depth JG HA BI WB effective depth WC FE (UV) 8 x WD depth WE (Circumference: 8 equivalents) 1 WA 1 XA 4 x JJ depth JK JA counterbore depth JB 2 x J through 22.5 (mm) DH DI DJ FE HA UV Size BE 1 27h8 27.5h8 14H8 8.2 13.5 29.5 XB effective depth XC WF 2 29h8 29.5h8 14H8 9.7 15.5 33.5 3 34h8 33h8 17H8 9.7 15.5 36 7 40h8 39h8

Made to Order

C port For D port D port For C port W B port W H ZZ + Stroke (A + B) SA + Stroke A H SB + Stroke B (mm) Bore size GC GD H SA SB W Air cushion ZZ WC WD 20 20.5 (21) 8.5 (9) 35 56.5 (56) 85.5 (86) 30 (25) (5) 212 25 21 (21.5) 9 (8.5) 40 56 86 30 (25) (5) 222 32 23 9 40 58 90 30 (27) (5) 228 40 23.5 (25) 7.5 (9) 50 66.5 (65) 97.5 (99) 20 (29) (5) 264 50 29 13 58 75 117 20 (33) (9) 308 63

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VA depth VB ZJ MHS MHC WC depth WD AH ZH, thread depth ZI AG AJ (AF) MHT MHY MHW BG BF MRHQ Misc. AH DAF 20MHSH3-32DB, 40DB Note) For dimensions, refer to the MHSH3-32 to 80D dimensions on page 12-7-39.

Possible to transfer a workpiece at low-speed.

Replacement parts/Grease pack part no: P523010-21 (10 g) 337 MSQX Series Dimensions Basic: MSQXBA XB effective depth XC WB effective depth WC 8 x WD depth WE (Circumference: 8 equivalents) 2 XA 4 x JJ depth 8 2 WA 2 x J JA counter bore depth JB 45 22.5 BE WF BD 2 x M5 x 0.8 Port (plugged) Effective depth FB DD D BB DE CA 2 x P Port FA 2 x JC depth JD H Q 2 x JU FD (UU) BC AW SE SD CB DF (

CV/MVGQ

to order solenoid valves Note 1) V3108-00 Voltage Electrical entry Note 2) V3108-00 Voltage Electrical entry x 23 Note 3) V3208-00 Voltage Electrical entry For the dimensions of DIN terminal, refer to page 10-15-59. 10-15-55 56 Series CV3 Basic Style: CV3B Lube type (CV3B), Non-lube type (CV3BN) Throttle valve With rod boot 24 11.4 12 RC 1/4 EXH RC 1/4 SUP Width across flats KA MM 35 e WD

MY1

Horizontal mounting z y Wd: Work piece (500g) x y Wc: MHL2-16D1 (795g) x z Wa: Connection plate t = 10 (880g) 3. Ceiling mounting 4. Vertical mounting x MY1MW40-500 z y x y z Wb: MGGLB25-200 (4.35kg) Center of gravity Weight and center of gravity for each work piece 2 Load blocking Work piece no.

MY2

Vertical mounting Features 4 x y z x y z Wc: MHL2-16D1 (795g) Wd: Work piece (1500g) Refer to the pages above for actual examples of calculation for each orientation. 2 Load blocking Weight and center of gravity for each work piece 42.5 150 Center of gravity 5 65 Work piece no.

CV/MVGQ

to order solenoid valves Note 1) V3108-00 Voltage Electrical entry Note 2) V3108-00 Voltage Electrical entry x 23 Note 3) V3208-00 Voltage Electrical entry For the dimensions of DIN terminal, refer to page 10-15-59. 10-15-55 56 Series CV3 Basic Style: CV3B Lube type (CV3B), Non-lube type (CV3BN) Throttle valve With rod boot 24 11.4 12 RC 1/4 EXH RC 1/4 SUP Width across flats KA MM 35 e WD

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wn Weight mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88 kg 65 mm 0 mm 5 mm 111 Wb 4.35 kg 150 mm 0 mm 42.5 mm Y 210 Y Wc 0.795 kg 150 mm 111 mm 42.5 mm Wd 1.5 kg 150 mm 210 mm 42.5 mm n = a, b, c, d 3.

3-Position Rotary Table

38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5 10 1.2 12 76 34 8.1 10 50.4 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 8 34.7 70 17 18.5 10 1.2 12 84 37 10.5 10.5 53.5 65h9 67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 10 39.7 80 19 21 12 1.6 15.5 100 50 12.4 12.5 60.6 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU JV Q S SC SD SU UU WA WB WC WD

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L LA PL HA Z + Stroke HA U B D Width across flats MB (lock plate fixing bolt) WD MA (Stroke adjuster) QW WR W H Section AA' TH (Head height of mounting bolt) +0.03 0 RL T TB +0.03 0 R RH 10 10 Detail of part U QL Q (n-1) x Q -Mounting reference planes

e-Rodless Actuator

Ceiling mounting Wc: MHL2-16D1 (795 g) x y z Wa: Connection plate t=10 (880 g) Wd: Workpiece (1500 g) 2 Load blocking Weight and center of gravity for each workpiece 42.5 150 Center of gravity 5 65 Work piece no.