SMC Corporation of America
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A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

M5 plug M-5P The cushion incorporated in the cylinder has a limit to the relationship between maximum working speed and load. Please check it with the cylinder catalog.

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

Direct operated poppet valve construction, Seal material: FKM, Body material: C36, stainless steel, Port size: M5, VALVE, PROPORTIONAL, VALVE, PVQ PROPORTIONAL VALVE, 2H, PVQ NO SIZE RATING, .20209 lb

Direct operated poppet valve construction, Seal material: FKM, Body material: C36, stainless steel, Port size: M5 PVQ PROPORTIONAL VALVE. VALVE, PROPORTIONAL. VALVE. PVQ NO SIZE RATING. .18038 lb. 2H.

Direct operated poppet valve construction, Seal material: FKM, Body material: C36, stainless steel, Port size: M5 PVQ PROPORTIONAL VALVE. VALVE, PROPORTIONAL. VALVE. PVQ NO SIZE RATING. .16797 lb. 2H.

26.1 3.5 7 (Bottom existing hole) M5 x 0.8 through hole 1(P) 3(R) 77.2 A B Body ported: VPA542V26.1 31 3.5 NO NC 2(A) 32 26 Switch mark 24.2 41.5 (Mounting hole) 24.2 Bracket (Mounting groove for M5 thread) 2-R 2.7 (PA port) Rc 1/8 PA 45.9 40.5 45 45 28 4.5 1.6 41.6 22 60 50 9 90.9 (Piping port) Rc 1/4, 3/8 30.7 26.1 3.5 7 1(P) 3(R) (Bottom existing hole) M5 x 0.8 through hole 77.2 5-5-17

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Type 20 (5 Port/Body ported) SS5YJ520P 05 A, B port Applicable blanking plate assembly SYJ5000-21-3A A A B A P, R port thread type P port 1/8 B Number of stations A B B 03 3 stations Nil 00F 00N 00T Rc G NPT NPTF : : Applicable connector assembly Refer to page 35. 12 12 stations R port 1/8 Type 41P (5 Port/Base mounted) How to Order SS5YJ541P 05 M5 A A B A, B port M5 x 0.8 A P, R port thread

x M5 x 0.8 (Breathing port) 5 x , 14 38 (Piping port) 1769 Series VFA5000 Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing port) 2 x 18 (Pilot port) Max. 2 Max. 2

If a directional switching valve (solenoid valve, mechanical valve, etc.) is mounted on the supply side of the regulator and repeatedly switched ON and OFF, wear of the nozzle/flapper section will be accelerated and a discrepancy in the setting value may occur. Therefore, avoid using a directional switching valve on the supply side.

Modular Type Regulator AR Series AC-A Regulator AR Series AF-A Model Port size Options AF-A AR10-A M5 x 0.8 AR-A AR-A AL-A AR20-A 1/8, 1/4 AW-A Bracket AC-B AF-A AR25-A AF-A 1/4, 3/8 Round type pressure gauge AR -A -B AR30-A AL-A Set nut (for panel mount)* AW -A -B AR40-A 1/4, 3/8, 1/2 AW AG AR40-06-A 3/4 * For AR20-A to AR40-06-A, panel fitting dimensions are different from those of the

B A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 (mm) Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

Screwing in fittings When screwing fittings into valves, tighten as follows. 1) M3, M5 (1) When installing SMC fittings, etc., follow the procedures below. After tightening by hand, tighten an additional 1/4 rotation for M3 and 1/6 rotation for M5 with a tool. However, when using a miniature fitting, tighten an additional 1/4 rotation with a tool after tightening by hand.