Hydraulic

Refer to page 100.

Table of Contents

VAC, 100 VDC or less.

Environment

2 Driver type* Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1 100 to 120 A2 LECSA2 200 to 230 B1 LECSB1 100 to 120 B2 LECSB2 200 to 230 C1 LECSC1 100 to 120 C2 LECSC2 200 to 230 S1 LECSS1 100 to 120 S2 LECSS2 200 to 230 LEY25: 200 mm or less LEY32: 100 mm or less *3 Rod flange is not available for the LEY25 with stroke 30 mm and motor option With lock. *4 Head

MXQ

MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

CP95

7. 63 CS95-63 80 CS95-80 100 CS95-100 Seal kits consist of items !3 to !

CP95

CS95-50 63 CS95-63 80 CS95-80 100 CS95-100 Seal kits consist of items !3 to !

MXS

MXS12-75 MXS12-50 MXS12-75 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N

CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Rated voltage 12, 24 VDC, 100, 110 VAC Note) The withstand voltage specification for the wiring unit section conforms to JIS C0704, Grade 1 or its equivalent.

CJ5-S

, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

SMC Pneumatic Clean Series

25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150

CJ5-S

, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

MXS Series Air Slide Table

MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf

Vacuum Unit

V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 r Connector (Supply valve/Release valve/Pressure switch for vacuum) For supply valve/release valve: 300 mm (Connector assembly)4 For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

valve SMC VQ110 -*L SMC VQ110 -*M JAPAN SMC VQ110 -*G JAPAN E E JAPAN P E P Plug-in unit manifold Plug lead unit manifold L type plug connector P 5 M type plug connector Grommet Series VQ100 Standard Specifications Standard Specifications Specifications Item specifications specifications 1watt 0.5 watt Type 3 port direct operated poppet type (NC) Fluid Air Inert gas 114 psi {8.2kgf/cm2} 100

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Output Black lead wire 100 MSD013P1E MSM012P1A 200/230 MR-C10A1 100/115 Mitsubishi Electric Corporation HC-PQ13 100 MR-C10A 200/230 Blue lead wire SGDE-01BP 100 SGME-01BF12 100/115 Yaskawa Electric Corporation SGDE-01AP SGME-01AF12 200/230 H S For motor mounting dimensions, refer to the dimensions for series LJ1 20 on page 143 as a reference for mounting and design.