2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

CLS

50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to

ISO Standard Hydraulic Cylinder

9 28 28 24 32 25 134 42 11 57 248 30 18 53 33 1/2 191 67 +0.052 0 63 50 29 25 to 800 90 64.3 M27 x 2 80 12 M12 x 1.25 20 13 36 36 30 32 32 136 39 13 55 265 30 17 68 33 1/2 200 71 80 60 34 25 to 800 115 82.7 M33 x 2 93 15 M16 x 1.5 28 9 45 45 41 39 41 159 46 17 66 308 40 20 76 40 3/4 229 77 168 +0.062 0 100 72 50 130 96.9 M42 x 2 101 15 M16 x 1.5 25 to 1000 36 10 56 56 50 54 52 47 19 67 363

MLGP

M6 x 1.0 M8 x 1.25 A, DB, E Dimensions: MLGPL (Ball bushing bearing) A, DB, E Dimensions: MLGPM (Slide bearing) A E A E Bore size (mm) 79.5 84 128.5 Bore size (mm) DB DB st 50 50 < st 200 200 < st 12 16 20 st 50 50 < st 200 200 < st st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 10 13 16 st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 51 51 58.5

MLGP

m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 80 80 Load weight m (kg)

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

C76

AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89

C76

to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to

ZP

30 x 50 3050 N S F C Pad type Symbol HW Type Heavy-duty (Oval) Dimensions: Pad Unit ZP2-3050HW 32 3 3.5 10 30 6 18 3 x 6.5 33 3 x 4 50 53 36 Symbol/Type Heavy-duty Ball Joint Pad H: Heavy-duty (Flat with rib) 40, 50, 63, 80, 100, 125 Pad diameter For adsorption of work pieces How to Order with inclined surface F 40 N H ZP2 T With adapter Vacuum inlet direction Direction Vertical Symbol T

MHZ

) MHZJ2-10C Internal Grip Pressure 0.7 MPa Pressure 0.7 MPa 20 MHZAJ2, MHZJ2 0.6 MPa 0.6 MPa Gripping force (N) 15 0.5 MPa 0.5 MPa 10 0.4 MPa 0.35 MPa 0.4 MPa 0.35 MPa 5 L 0 10 20 30 40 50 Gripping point L (mm) MHZJ2-16C 60 Pressure 0.7 MPa Pressure 0.7 MPa 50 Gripping force (N) 0.6 MPa 0.6 MPa 40 0.5 MPa 0.5 MPa 30 0.4 MPa 0.4 MPa 20 0.3 MPa 0.3 MPa 10 0.25 MPa 0.25 MPa 0 10 20 30 40 50

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Single Axis Electric Actuator Series LJ1H

/60Hz) 200/220VAC (50/60Hz) Axial Right Left Top Bottom Right entry Axial entry Bottom entry Specifications 200 14.9 300 17.0 400 19.0 500 21.1 600 23.2 800 27.3 5 to 40 (with no condensation) 30 50 1000 31.5 1500 41.9 1200 35.6 mm kg C kg N mm/s mm Standard stroke Body weight Operating temperature range Work load Rated thrust Maximum speed Positioning repeatability Motor Encoder Lead screw

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

HRX-OM-S004

mA 30 Rated operating current 50/60Hz 5 A 6.4 / 7.2 7.7 / 9.5 4.5 / 6.0 Rated power consumption 50/60Hz5 kW (kVA) 3.4 / 4.4 (4.5 / 5.0) (5.4 / 6.6) Sound level (Front 1m / Height 1m)5 dB(A) 70 Water-proof specification IPX4 Alarm cord list label 2pc.

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Note) Power consumption (W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

C95

37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45 50 60 70 15 18 20 23 27 30 51 54 65 67 86 96 32 36 45 50 63 71 32 40 50 63 80 100 10.5 12 15 15 18 18 14 16 21 21 25 25 Centre trunnion Bore (mm) TC B TA TF Part No.

CQM

-35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75