Fieldbus System

Do not remove the seal cap. 5 Connector (Unused) EX600-ED2-l EX600-ED3-l w e r e r w 10 Series EX600 Dimensions SI Unit EX600-SPRlA EX600-SDNlA EX600-SMJl EX600-SENl EX600-SECl 10.7 47 55.2 10.7 55.2 47 23.7 26 26 106 106 22 22 11.5 56.4 22.1 106.5 56.4 8 22.1 End Plate 42.5 5.5 EX600-ED2 EX600-ED3 26 85.1 5.5 20.5 20.5 8 90 8 90 106 106 30.35 13.2 30.35 56.6 36.65 30.2 73.6 56.6 13.2 30.2

C95

(variations as much as 30%) There may be large changes depending on the ambient environment. + Minimum length [mm] with bracket T Auto Switch 32 40 50 63 80 100 D-Z7/Z8, D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA 80 85 90 90 95 100 60 55 85 90 65 90 70 100 75 105 85 110 Mounting and Movement of Auto Switches Caution!

Shock Absorbers and Rate Controls

.90 23.6 lbs.

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO90+50(n-2) ""F ttl surface

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Microspeed Cylinder

Bore size (mm) Standard strokes (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Precautions Caution Mounting and Accessories 1. When mounting, hold the rod cover and apply an appropriate tightening force to the mounting nut, or fasten by applying the appropriate tightening force to the rod cover body.

Rotary Cylinder Series MRQ Size: 32, 40 1

) Moment of inertia0.0025 kgm2 Rotation time0.7 s/90, size 40 will be selected.

AMF

O.D.112 X I.D.90 X T3 5 pcs. Packing NBR O.D.112 X I.D.90 X T3 1 pc. O.D.112 X I.D.90 X T3 3 pcs. t V#6500 O.D.268 X I .D.225 X T3 1 pc. O.D.218 X I.D.175 X T3 1 pc. Gasket AL-62S AL63S 3 pcs. AL-31S y JIS B2401G35 5 pcs. O ring JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs.

2/3 Port Valve

90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

Series AP500

3) AP501 0.5 to 10 psig (0.0034 to 0.07 MPa) AP502 0.5 to 30 psig (0.0034 to 0.2 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90

240

force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 LEY -X5 80 70 10 11LEFS 100 50 5 11LEJS LEPY10 (Basic) LEPY10L (Compact) 25A50 60 LEC 50 LEC S 40 Lead 5 (LEPY10K) Lead 5 (LEPY10LK) LEC SS-T 40 30 Force [N] Force [N] LEC Y 30 20 Motorless Lead 10 (LEPY10J) Lead 10 (LEPY10LJ) 20 10 LAT 10 LZ 0 0 60% 70% 80% 90% 100% 50% 60% 70% 80% 90% 100% LC3F2 Set value of pushing force

MRQ

/2 70.5 ( 40 stroke) /2 75.5 ( 50 stroke) /2 75.5 ( 65 stroke) /2 80.5 ( 75 stroke) /2 78 ( 90 stroke) /2 83 (100 stroke) /2 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max

Industrial Filters

FGF IN 135 225 180 FGH 2 x R ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1

Slider Type Ball Screw Drive/11-LEFS Series

13 88 [(90)] (3.1) Stroke (90) [88] 61 LES [Origin] Note 4) Origin Note 3) 4 [2] 2 [4] 65 48.5 20 LEPY LEPS (68) 8 20 31 Motor cable (2 x 5) LER 68 53.8 12.9 8 Vacuum port Rc1/8 M4 x 0.7 thread depth 8 (F.G. terminal) LEH Motor option: With lock LEY -X5 Cable length 250 (214) 65 15 11LEFS 11LEFS 20 20 11LEJS Lock cable (3.3) 20 Motor cable (2 x 5) 25A( ) 6H9 depth 6 +0.030 0 n x 6.6 7 LEC

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Packing NBR O.D.112 X I.D.90 X T3 O.D.112 X I.D.90 X T3 3 pcs. O.D.112 X I.D.90 X T3 5 pcs. t Gasket V#6500 O.D.268 X I.D.225 X T3 O.D.218 X I.D.175 X T3 y AL-62S AL-63S AL-31S NBR JIS B2401G35 1 pc. JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs. JIS B2401G35 5 pcs. u O ring 4.6-10 Series AMD Dimensions: AMD150 to AMD650 Accessories D: With auto drain (N.O.)

•

n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O90+30~ 2 2 (n::: 2, 4, 6, 8) WiIh n pcs (n = 4, 8, 12, 18 ..)

7ND9071en

For ambient temperature over 70 C / 158 F use a heat resistant cable and cable gland suitable for at least 90 C / 194 F.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

Pin Clamp Cylinder Series CKQ/CLKQ

As a guide, an acceptable tightening level is reached by tightening the screw an additional 90 degrees (1/4 turn) from the point at which the screw is snug. (Refer to Figure 3.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(