2/3 Port Valve

valve 6A to 25A 32A to 50A VO301-00 Grommet, Conduit, DIN connector Others(Option) VNA11 VNA12 SF4--23 VN P1 P1 Grommet, Grommet terminal Conduit terminal DIN connector External pilot solenoid Electrical entry VQ B A B A AC(50/60Hz) 100V, 200V, Others(Option) 24V, Others(Option) 15% to +10%(rated voltage) Class B or equivalent Coil rated voltage(V) DC Allowable voltage Coil insulation (130

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

Series HAW Water Cooled Aftercooler 1

HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Model Screw type compressor Reciprocating type compressor Screw type compressor 2.2 55 110 7.5 75 22 37 Applicable compressor (kW) 2.2 37 75 7.5 55 15 22 300 8600 18000 1000 12000 3300 5700 (1) Air flow rate l/min(ANR) Reciprocating type compressor 300 5600 11000 1000 8000 2100 4300 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

HRX-OM-W032

Setting of the contact input signal 1 delay timer of reading Setting range: 0 to 300 seconds to Setting/Checking: Contact input signal 1 OFF detection timer 35. Press the [SEL] key once. Setting screen of contact input signal 1 OFF detection timer is displayed on the digital display. PV SV 36.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 2) When compressor discharge concentration is 30mg/Nm Specifications Models Model AMG150 AMG250 Drain Catch Series AMG Compressed air 1.0MPa Fluid Maximum operating pressure Rated flow rate Note) l/min (ANR) 300 750 Note) 0.05MPa Min. operating pressure Proof pressure The AMG series is installed in air pressure lines to remove water droplets from compressed air.

PA3000/5000/PAX1000

Note 2) When compressor discharge concentration is 30mg/Nm Specifications Models Model AMG150 AMG250 Drain Catch Series AMG Compressed air 1.0MPa Fluid Maximum operating pressure Rated flow rate Note) l/min (ANR) 300 750 Note) 0.05MPa Min. operating pressure Proof pressure The AMG series is installed in air pressure lines to remove water droplets from compressed air.

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

EXxx-OMZ0016

(Manufacturer) Communication cable for CC-Link VA-4DCC-110 (Correns) CC100 (Woodhead Japan) 110 1/2 W PCA-1567720 (socket) PCA-1567717 (plug) CC-Link dedicated highperformance cable 130 1/2 W VA-4DCC-130 (Correns) -20No.EX-OMZ0016-C EXW1-RD* Appearance EXW1-RDX*B* No.

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

High Vacuum Angle Valve

800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

CE2

To use the system in a magnetic field that exceeds this value, use a magnetic material to shield the sensor unit. 63 50 50 40 40 YES 100 200 300 400 500 100 200 300 400 500 NO Does the mounted load exceed the load given in the diagram? Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K.

RHC

Solenoid valve ( ): Effective area [mm2] : Metal : Metal seal Speed controller Composed effective area (mm2) E 64.8 to 67 D 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) G 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F 102.6 to 120 2 Standard type 1 With One-touch fittings C 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) Elbow type 1-A Refer to System

CXWM/CXWL

Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order. (-XB11) Nil None Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Suction Filter with Case FH99 Series

170 150 268 180 80 120 106.4 61.9 61.9 106.4 21.5 10 21.5 3B 3 1/2B M16 x 2 Thread depth 30 M16 x 2 Thread depth 30 280 145 140 273 210 80 120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 2) When compressor discharge concentration is 30mg/Nm Specifications Models Model AMG150 AMG250 Drain Catch Series AMG Compressed air 1.0MPa (145psi) Fluid Maximum operating pressure Rated flow rate Note) l/min (ANR) 300 750 Note) 0.05MPa (7psi) Min. operating pressure Proof pressure The AMG series is installed in air pressure lines to remove water droplets from compressed air.

High Power Cylinder Series RHC

Speed controller Maximum cylinder speed mm/s Composite effective area mm C group 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) D group 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) E group 64.8 to 67 G group 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F group 102.6 to 120 2 Standard type 1 With One-touch fitting Select solenoid valves, speed control

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 7 x 120l x 125l x 130l x 135l x 160l x 185l x 80l x 85l x 90l x 95l x 100l 30D (M) 35D (M) 15.5 35D (M) 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l CH QB32