Process Pump Series PA3000/5000/PAX1000 Series PB1000 Circuit example (1) 3 port solenoid valve Process pump PAX112 Regulator Ball valve Air filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4
9.4 97 9.5 9-11 9.6 9-11 9.6.1 9-11 9.6.2 9-12 9.6.3 9-13 9.6.4 9-15 10 10110-16 10.1 102 10.2 103 10.3 CC-Link 103 10.4 104 10.4.1 104 10.4.2 105 10.4.3 10-14 10.5 10-16 11 1-5 11.1 112 11.2 114 12 121128 12.1 122 12.2 123 12.3 125 12.3.1 125 12.3.2 126 12.4 127 12.5 128 13 13113-31 13.1 132 13.1.1 132 13.1.2 134 5 - 13.1.3 136
/VQZ 95 ,N.O.) Valve Mounting 1 2 3 1 2 3 0 1 0 1 After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below. When a 3 port valve is mounted on a 5 port manifold, The "A" port is the working port. The "B"port can either be plugged or unplugged.
Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3.6 [dm3/(sbar)].
75 85 95 85 95 105 125 80 90 100 120 90 100 110 130 95 105 115 135 CKQ 8 8 Arm Proper Tightening Torque 9 Bore size (mm) Proper tightening torque (Nm) 12 16 20, 25 32, 40 50, 63 0.5 to 0.7 2.8 to 3.5 11.5 to 14.0 24 to 30 75 to 90 8 9.5 Fig. 1 Flange Mounting 11 Caution The mounting bolt for the rod flange or head flange should be tightened to the torque shown in the table below. 10.5 Bore
100 110 120 145 170 100 105 110 120 130 155 180 120 130 140 165 190 125 135 145 170 195 Mounting bolt 8 CL C Spring washer D CL1 Note) When mounting 50 to 63 cylinders from the rod side, be sure to use the attached flat washers because the bearing surface is limited.
CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130 5 Series CXS-XB19 Dimensions CXS15--XB19 S ZZ 12 7 6 18 20 1 30 Z SS 2-3 x 16l AW (spring pin) 12 2-4.3 through 2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through)
0.8 (Manual unlocking unit) PL unlocking port Unlocks when pressurized Dust cover Rod end male threads M14 x 1.5 8 20.5 23.5 28.5 Rod end nut 7 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/40 (Emergency Stop) Foot/RLQL40 34 17 44 + Stroke Special cap bolt 33 64 4 64 78 4-6.6 3.2 7 7 62 + Stroke 102.2 + Stroke 11.2 11.2 Rod end nut 38.5 Front flange/RLQF40 40 54 8 17 95
Station L1 L2 3 96 68 6 153 125 8 191 163 10 229 201 20 419 391 2 77 49 4 115 87 5 134 106 7 172 144 9 210 182 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1.2-70 Series SYJ7000 Flat Cable Manifold SS5YJ7-21PStation 41.5 SY Manual override Depress and turn to operate and lock override.
When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.
5 is attached. 949 Series AL800/900 Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1 4
g 125 g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 (
Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100
D-M5NT D-M5PT Auto switch model 3 m (L) 60 Lead wire length 5 m (Z) 95 Ex.) Cylinder speed 1000 mm/sec. PLC response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.
-100 135 x 135L M8 x 60L 60 15 CVQM405 45 M5 x 45L x 65L 65 20 10 50 x 50L x 70L 70 25 15 55 x 55L x 75L 75 30 20 60 x 60L x 80L 80 35 25 65 14.5 x 65L x 85L 85 40 30 70 x 70L x 90L 90 7.5 45 35 75 x 75L x 95L 95 50 40 80 x 80L x 100L 100 75 45 85 x 85L x 125L 125 -100 50 90 x 90L x 150L 150 75 115 x 115L -100 140 x 140L Plate Non-rotating Accuracy Plate Allowable Rotational Torque Non-rotating
30, 35, 40, 45, 50, 75, 100 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 -X Manufacture of Intermediate Stroke 20Description Intermediate stroke range Data Bore size (mm) Intermediate stroke range (mm) Spacers are installed in a standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95
15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Manufacture of Intermediate Stroke Description Intermediate stroke range Bore size (mm) Intermediate stroke range (mm) Spacers are installed in a standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95
0.7MPa (High pressure type: 1.0MPa) Single 2 position 3 position 4 position 4.5 (0.25) SQ1131 15 or less 80 Rubber seal 20 or less 0.1MPa 0.15MPa Single 3.2 (0.18) SQ1230 15 or less 80 Metal seal 0.18MPa 0.18MPa Double (latching) Double (latching) Minimum operating pressure 4.5 (0.25) SQ1231 20 or less 80 Rubber seal 0.1MPa 0.1MPa Double (double solenoid) 3.2 (0.18) SQ1230D 10 or less 95
15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication response time does not include the processing time of the upper level device.
Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.