MXS

35 60 70 70 80 Z K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 NA 2 2 2 2 2 2 4 4 4 KA H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 ZZ 97 97 97 107 122 161 214 268 320 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 M 83 83 83 93 108 147 200 254

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

JA/JAH/JB/JS

JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 30 35 38 42 21 24 24 31 31 31 41 41 50 59.5 59.5

JA/JAH/JB/JS

JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 30 35 38 42 8 9 9 13 13 13 15 15 18 24 24 24

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 148 148 160.5 173 185.5 198 210.5 210.5 223 235.5 248 260.5 273 273 285.5 298 310.5 323 135.5 137.5 137.5 150 162.5 175 187.5 200 200 212.5 225 237.5 250 262.5 262.5 275 287.5 300 312.5 125 112.7 123.2

ISO Standard Hydraulic Cylinder

-125, BS5-160 BS5-180, BS5-200 When D-F5BA auto switch is shipped mounted on a cylinder, the above stainless steel screws are used.

Ionizer

Air purge: Yes (0.1 MPa) 8 90 Discharge time from 1000 V to 100 V 7 60 6 Catalog specification value: 30 V Discharge time (s) Offset voltage (V) 30 5 0 4 Without sensor 3 30 2 With feedback sensor 60 1 90 0 100 200 300 400 500 0 0 100 200 300 400 500 Installation height of feedback sensor (mm) Installation height of feedback sensor (mm) Ionizer 600 mm Feedback sensor Installation height of

V

Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without Lead Wire LO L Type Plug without Connector M M Type Plug with Lead Wire MN M Type Plug without Lead Wire MO M Type

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

25

Install the product according to the dimensions shown in the following figure, keeping away from structures or conductive items. 200 200 150 60 150 Unit: mm 435 IZS40/41/42 Series Specific Product Precautions 2 Be sure to read this before handling the products. Mounting Wiring/Piping Caution Warning 11.

LEF-OM006xx

0.35 1 2 5m 5m 10% 3() 452000Hz 1 () 4 5 6 7 8 < -> LEFS40 LEFS40 10 60 60 10 50 50 W(kg) W(kg) W(kg) W(kg) 40 40 30 30 20 20 10 20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 173 162.5 145 14 L n 4 185.5 175 155.5 15 2 148 137.5 124 12 3 160.5 150 134.5 13 5 185.5 175 155.5 15 6 198 187.5 166 16 7 210.5 200 176.5 17 8 210.5 200 187 12 9 223 212.5 197.5 13 2 160.5 150 134.5 13 3 173 162.5 145 14 5 198 187.5 166 16 6 210.5 200

VQ4000

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 110 to 200 Refer to Made to Order Specifications for stroke which exceeds the standard stroke length.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

MXW Series Long Stroke Slide Table

59 165 305 175 245 55 55 MXW25-225 1 590 7 113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed switch: D-A90 (V), D-A93 (V), D-A96 (V) Switch operation range Stroke (mm) Model

MXW

195 34 63 6 490 MXW25-200 155 275 142 60 225 59 88 6 540 MXW25-225 175 305 165 55 55 245 84 113 7 590 1 MXW25-250 200 335 187 67 60 275 109 138 7 640 1 MXW25-275 225 360 210 80 65 300 134 163 7 690 1 MXW25-300 245 395 232 52 60 60 320 159 188 8 740 2 8-7-19 20 Series MXW Construction !

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC