Best Pneumatics Vol. 14

Model L1 41.5 55 72.5 L2 43 57 75 L1 41.5 55 72.5 77.5 L1 41.5 55 72.5 77.5 L2 43 57 75 80 L1 41.5 55 72.5 L2 57 74 95 L1 41.5 55 72.5 L2 43 57 75 L1 41.5 55 72.5 L2 57 74 95 L3 43 57 75 L1 41.5 55 72.5 77.5 L2 57 74 95 102 AC20A AC30A AC40A AC40A-06 T S TV SV V Attachment Model L1 41.5 55 55 72.5 77.5 93 98 98 L1 28 41.5 55 55 72.5 77.5 93 98 98 L1 41.5 55 55 72.5 77.5 93 L2

Electric Actuator with Integrated Guide

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-B59W Same side 75 115 115 115 130 140 150 1 pc. 15 Different sides 35 80 80 95 2 pcs.

ZP

Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3.6 [dm 3/(sbar)].

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Modular F.R.L. Units

61 43.2 43.2 41.6 61 57 43.2 41.6 61 41.6 43.2 57 41.6 61 57 41.6 61 43.2 AC25-B 55.1 57.2 74 57.2 55.1 76 57.2 57.2 55.1 76 74 57.2 55.1 76 55.1 57.2 74 55.1 76 74 55.1 76 57.2 AC30-B 55.1 57.2 74 57.2 55.1 76 57.2 57.2 55.1 76 74 57.2 55.1 76 55.1 57.2 74 55.1 76 74 55.1 76 57.2 AC40-B 72.6 75.2 95 75.2 72.6 99 75.2 75.2 72.6 99 95 75.2 72.6 99 72.6 75.2 95 72.6 99 95 72.6 99 75.2 AC40-

2/3 Port Valve

N.C. 72 80 95 100 88 97 108.5 113.5 95 95 97 97 62 62 64 64 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 4.1-83 VXZ22/23 Construction FN.C.E Normally closed EN.O.F Normally open Component Parts Option Material No. Option Material No.

Modular F.R.L. Unit

L3 57 74 74 95 L1 41.5 55 55 72.5 L2 43 57 57 75 L4 43 57 57 75 L1 41.5 55 55 72.5 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 KSV KTV KSTV ST SV STV TV L2 61 76 76 99 Attachment Model 55 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 57 74 74 95 L4 43 57 57 75 L1 41.5 55 55 72.5 L2 61 76 76 99 L3 43 57 57 75 L4 43 57 57 75 L1 41.5 55 55 72.5 L3 57 74 74 95 L4 43 57 57 75 L1

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type ) 95 95 95 95 10 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Flai type Ftat type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type 95 95 95 95 107 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Ftat type Flai type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

Compact Hydraulic Cylinder

95 x 135L 135 -50D (M) -75D (M) x 100L 100 x 160L 160 DCHQB32-5D (M) -100D (M) CHQB80-10D (M) CQ-M5 x 70L 70 x 185L 185 -10D (M) CQ-M10 x 100L x 75L 75 100 -15D (M) -15D (M) x 80L 80 105 x 105L -20D (M) -20D (M) x 85L 85 110 x 110L -25D (M) -25D (M) x 90L 90 115 x 115L -30D (M) -30D (M) x 95L 95 120 x 120L 7 -35D (M) -35D (M) x 100L 100 14.5 125 x 125L -40D (M) -40D (M) x 105L 105 130 x

Environment

5 to 20 60% to 95% 21 to 50 60% to 85% 21 to 50 80% to 95% 800 LEC SS-T Lead 4: LEY32C 700 Lead 8: LEY32B LEY25 1 to 4 20% to 65% LEY25A 1 to 4 40% to 95% 5 to 20 35% to 65% 5 to 20 60% to 95% 21 to 35 50% to 65% 21 to 35 80% to 95% 600 LEC Y Lead 16: LEY32A Force [N] 500 400 Motorless LEY32 1 to 4 20% to 85% 5 to 20 35% to 85% 21 to 30 60% to 85% * The pushing force in the table shows the

LEY-OM007

3 2.5 5 10 4.5 9 18 1 1.5 3 1.2 2.5 5 85% 65% 85% 95% 95% ,[] LEY16*/25*/32*100%LEY16A*150%LEY25A*200% 2mm a.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

14 17.5 9.5 M8 x 1.25 18 16 20 M14 x 1.5 30 22 1/4 17 50 25 9 73 73 53 20 50 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 19 63 28 8 80 80 60 22.4 55 30 11 12 102 60 122 17 17 13 M10 x 1.5 22 20 25 M18 x 1.5 30 26 3/8 21 80 32 8 100 100 75 28 65 32 13 12 130 75 155 22 20 15 M12 x 1.75 26 26 29 M22 x 1.5 35 30 1/2 26 100 38 6.5 118 118 90 35.5 80 35 13 16 145 90 172

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

•

. ~ ZPT16g 16 18 12.5 21.5 33 56 89 3.5 ZPT25 f, 31.5 ~\ ~ 1.2 Peep type mm ZPT32 32.S 32.5 32.5 I': , Nlpqel M ; B ' C D E ' ' F G y ZPT40 95 95 95 95 95 95 ZPT50 I ZPnOD 10 12 15 24 35.5 58.5 71.5 6 I 95 95 ZPT16D 6 16 , 16 25 36,S 59,S, 72.5 7 , 7 Series ZPT /With Buffer Connection Female Thread (Buffer) Pad Type Flat, Rat with rib, Deep Vacuum Entry Vertical Mounting Buffer Body Flat

CLS

Bore size (mm) A B Hs Ht Hs Ht 125 1.5 1.5 69.5 71 69.5 69 140 1.5 1.5 76 77 76 76 160 1.5 1.5 85 88.5 85 85 180 7 5 95 97.5 95 95 200 9.5 7.5 106 108 106 106 9-9-22 23 Auto Switch Specifications Series CLS Proper Auto Switch Mounting Position for Lock Unit Auto switch Auto switch model D-M9N D-M9P D-M9B D-A90 D-A93 SMC CLS125 MODEL b a b a b Bore size (mm) 125 140 160 180 200 250 a 59 39

Hydraulic Cylinders

Mounting bolt D C C Model D D 55 Mounting bolt C Model Mounting bolt 70 M5 x 55l CHKDB50 CHKDB20 M10 x 70l 5 (M) 5 (M) 75 x 60l x 75l 10 (M) 60 10 (M) x 65l 80 x 80l 15 (M) 65 15 (M) x 70l 85 x 85l 20 (M) 70 20 (M) x 75l 90 x 90l 25 (M) 75 25 (M) 12.4 x 80l 95 x 95l 30 (M) 80 30 (M) 15.8 x 85l 100 x 100l 35 (M) 85 35 (M) x 90l 105 x 105l 40 (M) 90 40 (M) x 95l 110 x 110l 45 (M) 95 45 (M)

Compact Electric Actuator Series LG1

Work mounting reference plane 55 Body mounting reference plane 52.5 1 D 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 95 8(4)-6.2 C 100 () () (170) 95 95 B 110 20 (150) () () Dimensions A 329 429 529 629 729 829 929 1029 1129 1229 1429 B 60 160 260 360 460 560 660 760 860 1060 C 80 180 280 380 480 580 680 780 880 1080 D 486 586 686 786 886 986 1086 1186 1286 1386 1586 Model