5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244 275 285.5 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 L1 L2 L3 L4 1.12-21 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000

Non-contact Gripper

Bernoulli Type Cyclone Type High lift Vibration reducing High lifting force: Max. 44 N* Amplitude of the workpiece during gripping: 0.01 mm*or less * Solar battery silicon cell (l125 mm, t = 250 m) * In SMC conditions (How to calculate: Page 730) Non-contact gripper * Outer body diameter: 100 Lifting force (Supply pressure: 0.4 MPa) Workpiece (Solar battery silicon cell) Amplitude 50 40

Compact and Lightweight

ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs. ZH2-TB308-A 8 M4 x 185 2 pcs. 1 Select only One-touch fitting if ZH ejectors are to be clamped.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

Intrinsically Safe Valve

Control equipment connected to the barrier must not use or generate more than 250 V. 2. Installation should be in accordance with Canadian Electrical Code or ANSI/ISA RP12.6 Installation of Intrinsically Safe Systems for Hazardous (Classified) Locations and the National Electrical Code or ANSI/NFPA 70. 3.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

180 200 210.5 186 196 225 235.5 202 212 237.5 248 218 228 250 260.5 234 244 275 285.5 250 260 287.5 298 266 276 300 310.5 282 292 312.5 323 298 308 337.5 348 58 68 87.5 98 74 84 112.5 123 90 100 125 135.5 106 116 137.5 148 122 132 162.5 173 138 148 175 185.5 154 164 187.5 198 42 52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size

VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) n-Rc 1/8 (A port) (Pitch) (A port) Port size Stations n L1 L2 20 340 331 L1 L2 63 54 80 71 97 88 114 105 131 122 148 139 165 156 182 173 199 190 216 207 233 224 250 241 267 258 284 275 301 292 318 309 335 326 352 343 369 360 19 324 315 18 308

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L3 Station 2 58 49 43 3 74 65 59 Station 20 346 337 331 4 90 81 75 5 106 97 91 6 122 113 107 7 138 129 123 8 154 145 139 9 170 161 155 10 186 177 171 11 202 193 187 12 218 209 203 13 234 225 219 14 250 241 235 15 266 257 251 16 282 273 267 17 298 289 283 18 314 305 299 19 330 321 315 Port size One-touch fitting 30 Series SYJ500 Type 41R Manifold: Side Ported (External Pilot

Rotary Table/

Measure B Moment of inertia (kgm2) Size 7 3 2 1 0.0001 0.001 0.01 0.1 MSQB7A MSQB3A MSQB2A MSQB1A 1 0.2 0.3 0.4 0.6 0.5 1.0 0.9 0.8 0.7 Rotation time (s/90) Model With external shock absorber Full size (Picture of MSQB1A) With internal shock absorber 73.5 50.5 60 56 A 34.5 41 30 28 A B For high energy 34.5 30.5 28 25 C For low energy With adjustment bolt 20.5 23 18 16 D mm Mass (g) 70 105 150 250

70pvpump

Air consumption (l/min (ANR)) 140 120 SUP = 0.5 MPa 100 SUP = 0.3 MPa 80 SUP = 0.2 MPa 60 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air Consumption 400 Air consumption (l/min (ANR)) SUP = 0.5 MPa 350 300 Calculating Air Consumption (PA3000) 250 SUP = 0.3 MPa 200 Find the air consumption for operation with a 4 Hz switching cycle and pilot air pressure of 0.3 MPa from the air consumption graph

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

260.5 14 234 244 275 285.5 15 250 260 287.5 298 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6:

CG5-S

Basic type, Axial foot type, Front flange type, Rear flange type, Integral clevis type Mounting JIS symbol Double acting/Single rod Standard Strokes (mm) Note 1) Standard stroke Long stroke Bore size 20 25, 50, 75, 100, 125, 150, 200 201 to 350 Minimum stroke for mounting auto switches 25 301 to 400 32 301 to 450 Number of auto switches Model 40 301 to 800 25, 50, 75, 100, 125, 150, 200, 250

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MXF

130 120 MXF12 360 250 210 MXF16 690 500 360 MXF20 1370 1060 750 600 8-6-3 4 Series MXF Table Deflection (Reference values) Table Displacement due to Pitch Moment Load Table Displacement due to Yaw Moment Load Table Displacement due to Roll Moment Load Table roll deflection arrow A due to static roll moment applied at arrow F when Lr = (see table) and table is retracted.

Ionizer

Air purge Power supply voltage Sensing DC mode Autobalance sensor [Body-mounting type] : 300 mA or less Autobalance sensor [High-precision type] : 200 mA or less When sensor is not used : 170 mA or less Current consumption Pulse DC mode DC mode Discharge stop signal Maintenance detection signal 170 mA or less Connected to 0 V (Voltage: 5 VDC or less, Current consumption: 5 mA or less) Connected

End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Compact Electric Actuator Series LG1

350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions inside ( ) are for a 100mm stroke. 4 Series LG1H High Rigidity Direct Acting Guide Type LG1H20: Without Coupling / Construction 9 5 bn bn 4 8 1 3 2 bs A A' bl bq br bm bt bo bp bk 7 View A-A' 6 Material Note Parts list Material Note Parts list No.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80