Rotary Table/

80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision

Thermo-con/Rack Mount Type

Noise level Power consumption Air-cooled HECR004/006*1 49 dB 200 W HECR002 55 dB HECR004/006*1 400 W HECR008/010*2 Air-cooled Water-cooled HECR008*2 54 dB HECR008/010*2 300 W 200 W HECR012*2 48 dB Water-cooled HECR008/012 *1 200 W load *2 500 W load *1 200 W load *2 500 W load Simple operation Fluid fill port Fluid can be supplied without removing the product from the rack.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50

HRX-OM-X037

9-12 9.4.3 HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-T2 CH1 . 9-15 9.4.8 HRL100/200/300-A-40-T2 CH2 . 9-15 9.4.9 HRL300-A-40-T3 CH1 . 9-16 9.4.10 HRL300-A-40-T3 CH2 . 9-16 9.4.11 HRL100-W-40 CH1 . 9-17 9.4.12 HRL200-W-40 CH1 . 9-17 9.4.13 HRL100/200-W-40 CH2 . 9-18 9.4.14 HRL100-W-40-T2 CH1

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

210.5 186 196 225 235.5 202 212 237.5 248 218 228 250 260.5 234 244 275 285.5 250 260 287.5 298 266 276 300 310.5 282 292 312.5 323 298 308 337.5 348 58 68 87.5 98 74 84 112.5 123 90 100 125 135.5 106 116 137.5 148 122 132 162.5 173 138 148 175 185.5 154 164 187.5 198 42 52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet

Sine Rodless Cylinder Series REA

, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

HRL

V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option) CH1 0.1 15 to 25 HRL Inverter dual type 26 kW Indoor use 19 kW 9 kW CH2 0.5 20 to 40 1.0 kW (Max. 1.5 kW) 322 Circulating Fluid Temperature Controller Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series

SYJ300/500/700

Solenoid Valve for 200 V, 220 VAC Specifications Manual Override Operation Warning Warning Solenoid valves with grommet and L/M type plug connector AC specifications have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200 V, 220 VAC specification pilot valves, this built-in rectifier generates heat when energized.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

CJ2

Standard Stroke Bore size (mm) Standard stroke 15, 30, 45, 60, 75, 100, 125, 150 10 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Intermediate stroke length is available by the 1 mm interval with no stroke adjustment by spacer.

Stroke Reading Cylinder and Counter

, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 1 8 Rc 41 34 5.5 M6 x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60

air-filter-e

Pressure Control Equipment Industrial Filters Material NBR FKM Symbol N V FQ1010 FQ1011 FQ1012 Specifications FQ1010 Model FQ1011 FQ1012 1 (L 125) 1 (L 250) 2 (L 250 x 2) No.of built-in elements (L : Element length in mm) *BLUE links will lead to purchase pages. Element 1. Fiber element (P.P.) 2. Fiber element (Cotton) 3.

MGC

250, 300, 350, 400 MGCM Slide bearing 350, 400, 450, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 700, 800 200, 250, 300 MGCL Ball bushing baering 350, 400, 450, 500, 600, 700, 800, 900, 1000 *Short stroke or intermediate stroke(except above stroke): Manufactured upon receipt of order 3.20-2 Compact Guide Cylinder Series MGC Specifications MGCll20 MGCll25 MGCll32

MLGC

Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown

AC Servo Motor Driver (Pulse input type)

Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression

Air Preparation Equipment

Pressure Control Equipment Industrial Filters Material NBR FKM Symbol N V FQ1010 FQ1011 FQ1012 Specifications FQ1010 Model FQ1011 FQ1012 1 (L 125) 1 (L 250) 2 (L 250 x 2) No.of built-in elements (L : Element length in mm) *BLUE links will lead to purchase pages. Element 1. Fiber element (P.P.) 2. Fiber element (Cotton) 3.

VZ100/300/500

Note) Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Option Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

260.5 14 234 244 275 285.5 15 250 260 287.5 298 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6:

CE

, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5