15

Width across flats B1 MM [mm] Size B1 C1 H1 L1 L2 MM 25 22 20.5 8 36 23.5 M14 x 1.5 32 22 20.5 8 40 23.5 M14 x 1.5 63 27 26 11 72.4 39 M18 x 1.5 L1 L2 C1 H1 * The L1 measurement is when the unit is at the retracted stroke end position.

Integrated Controller

Width across fats K L1 L2 C1 H1 End Male Thread [mm] Size B1 C1 D H1 K L1 L2 MM Refer to the Web Catalog for details on the rod end nut and mounting bracket.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Note 1) A C Auto switch mounting dimensions Note 2) A3 Note 3) B1 A2 B2 (mm) Bore size 6, 10 0.4 0.3 0.4 0.3 A1 Symbol Auto switch model A1 A2, A3 B1 B2 D-A93 D-A93 (Reed auto switch) D-M9 (Solid state auto switch) D-M9 Specific Product Precautions Be sure to read this before handling.

Manifold Regulator ARM1000/2000 Series

1361213613PVQ Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

supply for control / input) Over current protection Built-in short circuit prevention Current consumption 50 mA or less Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Enclosure IP67 (manifold assembly) 2 Standard CE marked (EMC directive / RoHS directive), UL (CSA) 1: All unused connectors must have a seal cap fitted. -44No.EX-OMX1011 Dimensions EX600-L#B1

Rotary Table

Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice. Do not make the diameter of this hole larger by additional processing.

LEC-T1_C

Force OUT 1 ON OUT0 [ ] OUT1 OFF OUT2 [ ] a2 Output signal Output signal corresponding to No.1 terminal keykey Output signal corresponding to No.2 terminal Output signal corresponding to final terminal 77 - b ON/OFF SETSET ON/OFFON/OFF b1 SET AX IS. Force OUT 1 Output signal Output pin SET . ON/OFF SET AX IS.

C95

EW FL L1 L L2 d1 CD MR d2 R1 E2 UB CB 45 51 64 74 94 113 26 28 32 40 50 60 32.5 38 46.5 56.5 72 89 22 25 27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

ASR

9 @0 @1 @2 @3 @4 @5 Description Material Note PBT Body A U seal HNBR Electroless nickel plated Brass Body B Body C Brass Electroless nickel plated Electroless nickel plated Brass Seat ring Adjustment plug Brass Electroless nickel plated Electroless nickel plated Brass Body B1 Needle Brass Electroless nickel plated Electroless nickel plated Brass Body B2 Knob PBT Lock nut Note 1) Electroless

Table of Contents

9 @0 @1 @2 @3 @4 @5 Description Material Note PBT Body A U seal HNBR Electroless nickel plated Brass Body B Body C Brass Electroless nickel plated Electroless nickel plated Brass Seat ring Adjustment plug Brass Electroless nickel plated Electroless nickel plated Brass Body B1 Needle Brass Electroless nickel plated Electroless nickel plated Brass Body B2 Knob PBT Lock nut Note 1) Electroless

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order B1

MXW

Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65 110 110 MXW25 50 100 200 300 500 700 Piston speed (mm/s) Piston speed (mm/s) Graph (3) Graph (2) Static Moment Moment generated by the workpiece weight even when the cylinder is stopped L2 B1

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model (One-touch fitting connection) Model Applicable One-touch fitting size Effective area (mm2) Weight (g) A B Dimensions (mm) Recommended flow (m3/min (ANR)) Series Symbol Noise reduction 0.6 or less 1.0 or less 2.0 or less ANB1-C06 8 5 52 16 6 8 10 B1 38 dB (A) 28 94 25 ANB1-C08 13 12 73 22 ANB1-C10 28 Construction/Parts/Dimensions Specifications Compressed air 1.0 MPa 38 dB (A) Max.

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

MXW Series Long Stroke Slide Table

L2 B1 Pitch moment Mp=W (L1 + A) A1: Correction value for moment center distance Yaw moment My=W (L2 + B) Roll moment Mr=W (L3 + C) (mm) B1: Correction value for moment center distance C1: Correction value for moment center distance 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 L3 C1 (mm) (mm) L1 A1 MXW 8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 23 29 37 49 63 MXW 8 MXW12 MXW16 MXW20 MXW25 Mr

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148 137.5 123 12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 15 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60FD B1

OMU0023

Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.

Series SV

B1 Option 06 00 M1 With pressure gauge Without pressure gauge M1 Note) Note that a part number for Series SV1000 with pressure gauge differs depending on the position of the station (odd no. or even no.) on which the manifold is mounted to prevent the pressure gauges from interfering each other.

SZ3000

148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148 137.5 123 12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 13 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60FD B1