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Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Terminal block cover 6mm M3 screw Mounting screw (M4) Gasket Electrical entry 4-G1/2 Step 3. How to replace the terminal block cover Securely tighten the screws to the torque shown in the table below, after confirming that the gasket is installed correctly.

04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

MLU ML1C DMounting of Auto Switch -X Except D-P5DWL D-P5DWL 20Data Auto switch mounting screw Hexagon socket head cap bolt With SW M3 x 0.5 x 5l M3 x 0.5 x 6l Auto switch Switch mounting bracket With SW, M3 x 0.5 x 14l Round head Phillips screw 8 x 3.3 x t0.8 Flat washer Auto switch Auto switch mounting nut Auto switch mounting nut Tightening torque of auto switch mounting screws should

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Load factor:((Load weight x 9.8)/Theoretical force) x 100% Grommet type IP65 compatible Enclosure System Components Speed controller Silencer SPG (Steel pipe) dia. x Length AS420-03 AN300-03 10A x 1 m 2-5-1 Base Mounted 2 Series VQ4000 Precautions 1 Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

M3 x 0.5 6 2. The product performance of the Bernoulli gripper varies greatly depending on the type of workpiece.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Series sY100A o M3 o.22 (O.O12l sYJ300 o a M3 0.9 (0.05 NVZ300 a a M5 3.6 (0.2 NVZ500 o o 1/8 9.0 (0.s) NV2200 o M5 3.24 (0.18) NVZ400 o 1ta 9.0 (0.5) NVS3115 a a 1t8,'v4 '19.8 (1 .1 NVS3135 o o U4,3lA,112 46.5 (2.58) NVS3145 a o 1t2,3/4 81 (4.s) vx2 a o 1t8-1t2 3-31 (0.171.7) vx3 o o 1t8,3/4, 1t4 1.4-9 (0.08-0.s) vxz2 a 1 t 4 1 34-215 (1 .9-12) sg-z s4 118" 5132', s'lo aE qg 1t4'5t16',31A

Series sY100A o M3 o.22 (O.O12l sYJ300 o a M3 0.9 (0.05 NVZ300 a a M5 3.6 (0.2 NVZ500 o o 1/8 9.0 (0.s) NV2200 o M5 3.24 (0.18) NVZ400 o 1ta 9.0 (0.5) NVS3115 a a 1t8,'v4 '19.8 (1 .1 NVS3135 o o U4,3lA,112 46.5 (2.58) NVS3145 a o 1t2,3/4 81 (4.s) vx2 a o 1t8-1t2 3-31 (0.171.7) vx3 o o 1t8,3/4, 1t4 1.4-9 (0.08-0.s) vxz2 a 1 t 4 1 34-215 (1 .9-12) sg-z s4 118" 5132', s'lo aE qg 1t4'5t16',31A

YA-03 Joint. YU-03 Joint part no. RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Carbon steel (nickel plated) mm 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) Part no.

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

(MPa) Pressure drop (MPa) 0.1 MPa 0.1 MPa Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 1 2 AMD450 AMD850 1 2 1 B B 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line 0.1 MPa 0.1 MPa Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 14-20-24 4 Micro Mist Separator Series AMD Construction AMD150 to AMD650

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.