SZ3000

Double wiring specification Double wiring specification Connector entry direction 04 05 09 10 4 stations 9 stations 1: Vertical connector 2: Horizontal connector 5 stations 10 stations Specified wiring (up to 19 solenoids possible) Specified wiring (up to 9 solenoids possible) ... ... ... ... 09 19 9 stations 19 stations Note 1) Double wiring specifications: Single, double and 3 position

Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

JXCx-OMT0023

PB ) . 21 4.2.1 Parameter list . 21 4.2.2 Detail list . 23 4.2.3 Position smoothing . 31 4.3 Extension setting parameters (No. PC ) . 32 4.3.1 Parameter list . 32 4.3.2 List of details. 34 4.3.3 Alarm history clear . 41 4.3.4 Drive recorder function . 42 4.4 I/O setting parameters (No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 18.5 43.3 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 21 31.8 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 22 32.8 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21

13

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

H/DL/L/LL

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

CNG

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

0.

Formula: L5 = 20n + 8 L3 = 20n + 26 n: Stations (Max. 20 stations) Dimensions L n 2 3 123 112.5 86 18.5 68 4 148 137.5 106 21 88 5 160.5 150 126 17.5 108 6 185.5 175 146 20 128 7 198 187.5 166 16 148 8 223 212.5 186 18.5 168 9 248 237.5 206 21 188 10 260.5 250 226 17.5 208 11 285.5 275 246 20 228 12 298 287.5 266 16 248 13 323 312.5 286 18.5 268 14 348 337.5 306 21 288 15 360.5 350 326 17.5

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Intrinsically Safe Valve

21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector with cover (LL) 53-SS5Y7-42Terminal type (TT) 53-SS5Y7-42L (Lead wire length) 120.5 37.1 L (Lead wire length) 81.5 Stations Stations 81.5 53.5

PFxx-OMJ0005CN

2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

SMI_PortConfigList (acquires IO-Link master port parameter: Read) [Request] Data Value Notes Service code 0x32 Class 0x90 Instance 0x01 to 09 Unit No. +1 Attribute 0x65 to 68 Port No. 1 to 4 Data[0] 0x80 Fixed value Data[1] 0x00 Fixed value [Response] Data Value Ack[0] to [3] 0xB20 When reading is succeeded: 0xB20 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3: DI_C/Q 4: DQ_C/Q Data[0]

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

-1A Blanking plate assembly SYJ3000-21-2A Round head combination screw SY100-33 -2 (M1.7 x 7, matt nickel plated) Blanking plate SYJ3000-21-1 Steel ball is driven in.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

-1A Blanking plate assembly SYJ3000-21-2A Round head combination screw SY100-33 -2 (M1.7 x 7, matt nickel plated) Blanking plate SYJ3000-21-1 Steel ball is driven in.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

18.5 16 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 10 18.5 AS3001F-07-3 AS3001F-12-3 76 11 34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35 69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1