VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

90

Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 Suction flow (Port exhaust

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

-07 34.4 56.2 50 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 12.9 20.6 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.8 43.8 42.8 37.8 25.2 46.1 54.4 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 23 63 18.5 19 12.9 20.6 AS331FG-03-08 AS331FG-N02-11 28.2 49.1 56.2 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 59 16.2 69 23 21 46.5 41.5 23 R 3/8 19 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 53.5 46.1 21 25.6 43.7 38.7

F

3.5 8 14 KQU08-U02 17 15.2 52 15.2 46 18.5 25.6 1/4 1/8 KQU07-U01 14.29 13.2 44.5 13.2 40.5 17 4.6 8 38 KQU08-U03 17 15.2 51.5 15.2 45.5 18.5 25.6 1/4 1/4 KQU07-U02 14.29 13.2 46 13.2 40 17 4.6 10 14 KQU10-U02 19 18.5 57.5 18.5 51.5 21 40 1/4 3/8 KQU07-U03 17.46 13.2 46.5 13.2 40.5 17 4.6 10 38 KQU10-U03 19 18.5 57.5 18.5 51.5 21 40 5/16 1/8 KQU09-U03 17.46 15.2 50.5 15.2 46.5 18.5 6 10

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-07 34.4 56.2 50 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 12.9 20.6 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.8 43.8 42.8 37.8 25.2 46.1 54.4 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 23 63 18.5 19 12.9 20.6 AS331FG-03-08 AS331FG-N02-11 28.2 49.1 56.2 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 59 16.2 23 69 21 46.5 41.5 23 R 3/8 19 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 53.5 46.1 21 25.6 43.7 38.7

Vacuum System Peripherals:

Special specifications M 07 07 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly. w Ejector Valve Model Fill in the blanks below with symbols of necessary specifications.

Solenoid Direction: Type 40: A Port Bottom Ported; Type 42: Opposite Side of A Port, Piping: A Port Bottom Ported, Stations: 7 Stations, Port Size: 1/8 NPTF, Bracket: Bracket

Table of Contents

AC DC 60 40 1 99 60 120 183 Application Example Maximum 40 N.C. (VX31) N.O. (VX31) C.O.

VM

Roller Lever Adjustable Rod Lever P3.5-40 P3.5-34.

AS-FG/ASD-FG

AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03 AS431FG-N04

Compact Manifold Regulator Series ARM5

60 80 100 0 50 100 150 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100

VM

(Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

One-touch Fittings

28.4 6 14 1/4 KQ2Y10-02lS 17 15.9 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03lS 17 15.9 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04lS 22 15.9 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 H 10 Connection thread (With sealant) 12 1/4 KQ2Y12-02lS 17 18.5 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03lS 17 18.5 17 23 30.8 23 48.8 17 57.4 45.4 9 28.2 1/2 KQ2Y12

Proposals for Energy Saving

32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-07 34.4 55.7 46.9 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 20.6 12.9 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.3 43.3 42.8 37.8 25.2 45 49.5 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 63 18.5 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3) Exhaust throttle SQ Series 38 1 4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 VFS Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 VFR VQ7 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) External Pilot (Note 2) External Pilot (Note 2) DIN terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 External pilot Sub-plate External pilot External pilot DIN terminal M8 connector SY9 40 Standard Option Made to order

V

~120PSI 40~120 PSI Temperature Specification + -3%F.S.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-07 34.4 56.2 50 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 12.9 20.6 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.8 43.8 42.8 37.8 25.2 46.1 54.4 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 23 63 18.5 19 12.9 20.6 AS331FG-03-08 AS331FG-N02-11 28.2 49.1 56.2 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 59 16.2 69 23 21 46.5 41.5 23 R 3/8 19 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 53.5 46.1 21 25.6 43.7 38.7