Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

VFR3000 Series

Light/Surge Voltage Suppressor Used as a 3 Port Valve Plug-in type Non plug-in type (VFR3 00) (VFR3 10) (VFR3 40) Plugging one of the cylinder ports (A or B) enables use as a normally closed (N.C.) or normally open (N.O.) 3 port valve.

1

COM. 4: Black (SOL.a) 2: White (SOL.b) 58.6 4 3 2 28 15.5 SOL.a SOL.b 1 Panel fitting dimensions Plug Triangle mark 2 x M4 2 x 4.5 Unused (Without terminal) Fitting dimensions for panel mounting Refer to panel fitting dimensions for details. 4.5 32 40 18 18 16 3.5 57 4 30.5 62 9.5 3 5 1 4 2 1/4 [1(P), 2(A), 4(B), 5(EA), 3(EB) port] 18 25 Note) These figures show the SY5200-5Z1-WO-B02F. 37

A

2 14 72 M10x1.5 depth 16 80 ; 300 37 40 50 25 40 3 20 89 M10x1.5 depth 22 100 ; 300 37 40 60 30 50 3 20 110 M12x1.75 depth 22 Bore K KA MM NA P S TA **TC (mm) H ZZ 20 4 6 M8x1.25 24 18 77 11 M5x0.8 35 147 25 5 8 M10x1.25 29 18 77 11 M6x0.75 40 157 32 5.5 10 M10x1.25 36 18 79 11 M8x1.0 40 159 40 6 14 M14x1.5 44 18 87 12 M10x1.25 50 187 50 7 18 M18x1.5 55 14 102 13 M12x1.25 58 218 63 7 18

2

18 9 26 5 50 AC40-A Y500T-A 5.2 96 48 89.6 40 18 9 26 5 50 AC40-06-A Y400T-A Y200T-A Replacement Parts Description Material Part no.

Compact Hydraulic Cylinder

8 40 3/8 222 30 37 39 32 25 to 800 M10 x 1.25 13 0.15 0.13 40 69 65 45 11 12 158 220 11 32 11 43 8 3/8 46 33 36 222 42 25 to 800 32 M10 x 1.25 13 50 85 76 52 14 15 176 241 13 35 50 8 11 1/2 58 43 246 37 40 M10 x 1.25 46 25 to 800 15 63 98 90 63 18 15 186 263 15 60 14 42 10 65 1/2 270 43 42 45 52 M12 x 1.5 25 to 800 18 0.15 80 118 110 80 18 17 202 287 16 18 50 72 12 87 3/4 302 50 44 65 40

Table of Contents

40 22 10 10 18 18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS

Hydraulic

8 3/8 40 222 37 30 39 32 M10 x 1.25 25 to 800 13 0.15 0.13 40 69 65 45 11 12 158 220 11 32 11 43 8 3/8 46 222 36 33 42 32 M10 x 1.25 25 to 800 13 50 85 76 52 14 15 176 241 13 35 11 50 8 1/2 58 246 43 37 46 40 M10 x 1.25 25 to 800 15 63 98 90 63 18 15 186 263 15 42 14 60 10 1/2 65 270 43 45 52 42 M12 x 1.5 25 to 800 18 0.15 80 118 110 80 18 17 202 287 18 50 16 72 12 3/4 87 302 44 50 65 40

CQ2

Flange (mm) Without auto switch With auto switch Bore (mm) Stroke range (mm) A L1 FZ FX FV FT FD L2 M A B B 40 72 62 54 8 5.5 5 to 50 40 17 7 64 74 50 40 50 89 76 67 9 6.6 10 to 50 66.5 40.5 76.5 50.5 50 18 8 63 108 92 80 9 9 68 42 78 52 10 to 50 60 18 8 Refer to p.2.3-18 for rod end nut and optional bracket. Double rod (40, 50, 63) Change SCQ2 Bore size #7.

Compact Cylinder

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

Table of Contents

3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 x 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) Dimensions in ( ) are the case of soft nylon tube.

AC Servo Motor Driver (Network card type ）

) . 18-84 18.5.4.11 Jog mode (jg) . 18-89 18.5.4.12 Indexer mode (idx) . 18-96 18.5.5 Touch probe . 18-103 18.5.6 Quick stop . 18-107 18.5.7 Halt . 18-108 18.5.8 Software position limit . 18-109 18.5.9 Torque limit . 18-109 18.5.10 Polarity . 18-110 18.5.11 Degree function . 18-112 18.5.12 Torque offset . 18-114 18.6 MANUFACTURER FUNCTIONS . 18-115 18.6.1 Object for status monitor . 18-115

Smooth Cylinder/Low Speed Cylinder

) MQ Bore size (mm) AL B B1 C D E F G H1 J K KA LD LH LS LT LX LY A RHC 40 50 63 80 100 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 9.0 40 138 3.2 42 70 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 9.0 45 144 3.2 50 80 RZQ 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 11.5 50 166 3.2 59 93 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 13.5 65 204 4.5 76 116 40 37 116 41 92 30 52 14 21 16

Air Cylinder

155 180 205 230 Bore size Stroke range B E F FX FD FT H 20 Up to 125 40 12 2 28 5.5 6 35 25 Up to 200 44 14 2 32 5.5 7 40 32 Up to 200 53 18 2 38 6.6 7 40 40 Up to 200 61 25 2 46 6.6 8 50 * End boss is machined on the flange for E.

NCQ2/CQ2

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

Air Cylinder Series CM2

1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size 36 18 68 81 93 106 131 156 181 30 20 25 112 60 40 40 10 9 62 122 36 18 72 85 97 110 135 160 185 32 25 32 114 60 40 40 10 9 64 124 36 18 72 85 97 110 135 160 185 32 32 40 77 53 53 11 10 88 154 143.5 46 20 77 90 102 115 140 165 190 41 40 With Rod Boot (mm) l Symbol ZZ Z JH JW Stroke 1 to 50 1 to 50 1 to 50 51

5 Port Solenoid Valve Series SY3000/5000/7000/9000

connector (L): 10-SY5 40(R)-L-02 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 83.4 75.9 MAX.10 157.8 50.6[57.6] 64.6 35.2 49.5 55.1 M8 x 1 37.6 (Lead wire length) Approx. 300 61.7[68.7] Pg7 83.2 39.8 38.3[40.5] 76.7 33.3 18 18 18 18 18 18 18 18 139.6[144] 120[124.4] 57.2 17.3 60.7 137.8 58.1 159.6 28 28 28 28 9.5 22 9.5 22 48.1[50.3] 47.2 9.5 9.5 22 22 Note) Refer

Table of Contents

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

C UA YB-03 32, 40 9 80 50 18 6.5 10 Material: Chromium molybdenum steel (Nickel plated) Applicable bore size (mm) Part no.

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB