Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

V

11.8 15.8 42.2 25.6 39.5 35.1 10.5 17 35 38.9 33.9 ASP330F-N01-09S 5/16 NPT1/8 10-32UNF 1/2 8 15.2 14.2 11.8 15.8 44.7 28.2 39.5 35.1 10.5 18.7 35 41.7 36.7 ASP430F-N02-07S 1/4 NPT1/4 NPT1/8 11/16 1/2 13.2 18.5 15 18 43.9 25.6 48.7 42.6 10.9 17 68 41.7 36.7 ASP430F-N02-09S 5/16 NPT1/4 NPT1/8 11/16 1/2 15.2 18.5 15 18 46.4 28.2 48.7 42.6 10.9 18.7 68 46.9 41.9 ASP530F-N03-09S 5/16 NPT3/8

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

) C8 (8 One-touch fitting) M5 x 0.8 Rc(PT) 1/4 Port size C4 (4 One-touch fitting) C8 (8 One-touch fitting) Ports A, B C6 (6 One-touch fitting) C10 (10 One-touch fitting) PA/B 9.2 (0.51) A/BR 10.3 (0.57) PA/B 5.2 (0.29) A/BR 3.8 (0.21) PA/B 8.1 (0.45) A/BR 8.5 (0.47) PA/B 9.2 (0.51) A/BR 9.5 (0.53) PA/B 18 (1.0) A/BP 18 (1.0) PA/B 17.6 (0.98) A/BP 14.4 (0.8) PA/B 18 (1.0) A/BP 17.1 (0.95)

MQQ

15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-20 20 Low Friction Cylinder: Anti-lateral

MQQ

M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-20 20 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.

Electric Actuator with Integrated Guide

1.

V

4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L

Basic Type/Direct Mount Type

43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CY1H CY1F CYP P (Piping port) Model TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

0.4

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1, !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

REC

X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 200 to 1000 NN P S X Y Z ZZ Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 150 to 700 146 20 8 21 215 M26 X 1.5