Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

Series KG Stainless Steel One-touch Fittings

(mm) M5 Weight (g) D A Nylon Urethane M5 0.8 KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.7 2.6 8 3.6 2.7 2.7 4.1 2.7 15.5 13 16 19 16.5 9.5 9.8 11.5 11.8 13.8 2.5 19 23 20 4 1 8 3 2.5 M5 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 20 17 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5 30 14 8 18.5 16.2 23.3 6 17

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

Vacuum Pad

Buffer assembly part no. q ZPB2J10-B5 [Weight: 21.8 g] Buffer assembly part no. q ZPB2K10-B5 [Weight: 23.6 g] w ZPB2J20-B5 [Weight: 35.9 g] w ZPB2K20-B5 [Weight: 36.9 g] Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 D A B 4 D A B M10 x 1 M10 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 2 M5 x 0.8 2.5 M5 x 0.8 4 Dimensions Dimensions

High Vacuum Angle Valve

, Chief part: Stainless steel, FKM (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure [MPa(G)] 0.4 to 0.7 Pilot port size XLA M5 Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

o

9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

o

9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

3

(Clamp part) Note 1) 1.4 1.2 0.9 0.7 Note 1) Refer to Rotary Angle figure.

Basic Type/Direct Mount Type

43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CY1H CY1F CYP P (Piping port) Model TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

MVGQ

x 0.8 R port (with plug) MK(2) RS Q G 54.4 (GZ: 55.1) [56.1] RS H A RZQ MI W S M5 x 0.8 P port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

SX

Port size M5 x 0.8 SX3000 Port size M5 x 0.8 SX3000 SX3000-38-20A SX5000-38-1 A SX7000-38-1 A SX3000-39-20A SX5000-39-1 A SX7000-39-1 A 1 8 1 4 SX5000 1 8 1 4 Note) For protection of the wiring unit section from drain, it should be piped at the EA port so that it will not be directly exposed to exhaust from the valve.

MXQ

1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Title not found

1 1 3 06 08 1 0 1 2 1 6 ;il H,r ,u x,N 1 2 m m Double universal male elbow 10 32 UNF Thread 1/16" NPT 1/8' NPT l+ trtpr H L' w' T' Y U' E Hex. socket head universalelbow 33 34 Extended Different dia. branch "Y" Double branch "Y" M5 M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a a a a a a The use of compact spacer with bracket

CJ2X/CUX/CQSX/CQ2X/CM2X

2 CV +1.4 0 mm Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

2 CV +1.4 0 mm Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

1 i q !4 r e !0 !1 q i !2 o !3 y Meter-in type Component Parts No.