Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

SFOD-OMT0005CN

(PLC ) Alarm _Comment _061 (01-061) <> (1) ()1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2[2](P.53) 3D B RESET (+)(-) Alarm _Comment _062 (01-062) (+)(-) 3E B RESET <> (01-096) C RESET <> -64- (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON (SVRE ON) DRIVE ON (01-099) <> SET OFF DRV C RESET <> <>12 (01-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] <> <>

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

Vacuum

No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Model T2 H D1 T1 D2 D3 L3 L4 L1 L2 9 4.7 10 31 10.3 0.7 27.4 13 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 14.3 R 1/8 14.6 7.2 18 34.7 13.2 1.2 31.6 33 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 18 R 1/4 19.5 7.2 27.2 40.2 17.5 1.2 36.7 72 AS320-N02-SD NPT 3/8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3

Vacuum

No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring

Series AP500

2PW Delivery pressure Connections (Inletq, Outletw) Code Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Bonnet option 01 02 06 10 15 Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face

ZSE1/ISE1

setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000

Table of Contents

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: None, CE Compliance: Q (CE Marked)

LEC-OM02904

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

LEC-OM07605CN

46 D 62 E 47 E 63 F 48 F 64 4 9 4. 4.3.2 (1) 1.6 s 0.2 s (1 ) (2 ) b: Ready offOFF c: Ready onOFF d: Ready onON (2) ((2)((1)AL.32 0.8s 0.8s 0.2s (2 ) (1 ) (2 ) (1 ) n 4 10 4. 4.3.3 (1) ON ON (SSCNET/H ) (SSCNET/H) ON (SSCNET/H ) (SSCNET/H) () () : 1 [AL. 50 1] () :1 [AL.50 1] () Ready off OFF 0.8 s Ready on 0.8s 0.8 s () 0.8s () Ready on Off on :1 [AL.E1 1] : 1 [

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

(1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.

SV

Branch crimped connectors 1-2-47 44 Series SV Type H NKE Corporation Uni-wire H System Type V Mitsubishi Electric Corporation CC-LINK System Type U JEMANET (JPCN-1) B RATE STATION NO. 4632 4632 4632 1 1 1 9 9 9 PW LRUN DIP.SW ADDRESS 2 2 2 8 8 8 Name of terminal block, LED Note Cable wiring 3 3 ON POWER ALARM COMM 3 7 7 7 1 4 4 4 ON 6 6 6 O N SD RD LERR. 5 5 5 x 10 x 1 4632 POWER SEND 1 2