CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Section TA/TB (mm) Bore size (mm) 20 25 32 40 50 63 TC TDH9 TE TF TG M5 x 0.8 4 0.5 5.5 +0.08 0 8 +0.08 0 M6 x 0.75 5 1 6.5 10 +0.08 0 M8 x 1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5 M10 x 1.25 14

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Compressed Air Preparation Filter

42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Cylinder with Lock Series CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C Weight [kg] IDF-S0203 IDF8E 3/4 609 410 75 3.8 IDF-S0187 IDF11E 3/4 669 405 89 4.0 42 IDF/IDU Series Dimensions [Conversion bypass piping set] IDF6E to 15E1 Compressed air outlet Port size Compressed air inlet Port size (F) (G) (B) (A) (J) H I E C D 4 x 13 [mm] Dimensions Part no.

CNG

TC TB AL A K F H CNS C 0.1 C 0.1 NA BC 8-J BN S + Stroke F ZZ + Stroke CLS CLQ MLGP e RLQ 8 f l MLU ZZ + l + Stroke h + l ML1C With rod boot D-X Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 2018 15.5 13 38 93 1/8 44.5 14 8 12 2 87 10 (12) 18 5.5 6 4 8 5 26

REA/REB

Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8

MQQ

thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18

MQQ

G5-S CV MVGQ CC RB J D-X 20Data 10-5-19 19 Series MQM Dimensions Basic style: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7

IDG

Purge air discharge tubing port for dehumidification Drain Discharge Drain Drain With drain guide Applicable tubing O.D. : E With float type auto-drain J Option: P With drain guide A B Model C D E F H J Port size: 1/4 Port size: 3/8 Port size: 1/4 Port size: 3/8 Rc 1/4 (Without valve mechanism) Hexagon width across flats 17 IDG10M/10HM IDG20M/20HM 211 187 241 212 236 89 170 266 238 268 8

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

39

19 R6 R6 Weight kg 0.6 0.7 0.8 Weight kg 0.6 0.7 0.8 NAAMS code ACA226M ACA227M ACA228M NAAMS code ACA256M ACA257M ACA258M A B C D E F G H I J A B C D E F G H I J Part no.

Cylinder

Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 !5 !

10

12.5 8 7 6 18 Width across flats 8 (4 locations) 15 31 20 K (46) 12.4 15 15 Closed E 7 7 20 Open F 10 10 34 G 4 x M4 x 0.7 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-10DZ 38 36 51 26 56 76 100 24 80 MHL2-10D1Z 54 52 67 42 78 118 142 39 108 MHL2-10D2Z 72 70 85 60 96 156 180 57 146 J dimension is at fully closed.

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42 53 35 8-8-14 14 Precision Air Slide Table Series MXP Dimensions: MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 MX 7 4 H 2.3 11.2 3 MTS 1 MY 1 0.05 D B 9.5 3.5 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

CLS

-X BG BE 20l f 15 Data h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 A BA BB BC BD BE BG BF BZ BV BW BP D EA FY FZ GA GB GC H K BY AL C E F KA B FA M FD J FT FX 107 145 75 18 145 110 136 115 90 90 90 115 115 140 190 100 230 16 58 110 M14 x 1.5 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59