Size: 2 (Base Mounted), Operation: 3 (Manual Handle Style), Sealant: Nitrile Rubber, Port Size: 01 (1/8), Thread: N (NPT)

Size: 2 (Base Mounted), Operation: 3 (Manual Handle Style), Sealant: Nitrile Rubber, Port Size: 02 (1/4)

Size: 2 (Base Mounted), Operation: 3 (Manual Handle Style), Sealant: Nitrile Rubber, Port Size: 02 (1/4), Thread: N (NPT)

Size: Base Mounted, Operation: Manual Handle Style, Sealant: Nitrile Rubber, Port Size: w/o Sub-plate, Thread: Rc(PT), Option: Pressure Gauge+Silencer for Bleed Port

Size: Base Mounted, Operation: Manual Handle Style, Sealant: Nitrile Rubber, Port Size: 1/8, Thread: NPT, Option: -

Size: Base Mounted, Operation: Manual Handle Style, Sealant: Nitrile Rubber, Port Size: 1/4, Thread: -, Option: -

Size: Base Mounted, Operation: Manual Handle Style, Sealant: Nitrile Rubber, Port Size: 1/4, Thread: NPT, Option: -

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Nut Material: Rolled steel 03 32 01 03 TZ Applicable bore (mm) Applicable pin O.D. Part no. TU TV TW TX TY 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Part no.

LEC-OM07605CN

(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

760.5 773 785.5 798 810.5 823 835.5 L dimension 130.1 132.4 134.6 136.9 139.1 141.4 143.6 145.9 148.1 Weight (g) 150.4 60 61 62 63 64 65 66 67 68 69 No. 848 860.5 873 885.5 898 910.5 923 935.5 948 960.5 L dimension 152.6 154.9 157.1 159.4 161.6 163.9 166.1 168.4 170.6 Weight (g) 172.9 70 71 No. 973 985.5 L dimension 175.1 177.4 Weight (g) 10-SV3000/4000 DIN rail dimensions and weights VZ1000

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

SYJA3000

Pilot port size 11 (0.6) 2 position single 90 SYJA7120-01 11 (0.6) 2 position double 110 SYJA7220-01 Body ported Base mounted (With sub-plate) 8.5 (0.47) 9 (0.5) [6.5 (0.36)] 3 position closed center SYJA7320-01 1/8 M5 X 0.8 3 position exhaust center SYJA7420-01 120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01

Fieldbus System

0.6 lbs (275 g) Weight 0.75 lbs (340 g) Note 1) M12 (4-pin) connector can be connected.

Vacuum Unit

g x 5 pcs. + 5 g x 5 pcs. + 141 g = 661 g 18 A ZK2mA Series Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) The flow rate characteristics correspond to the standard supply pressure.

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

Gun Type Ionizer

08 8 (Metric) 09 5/16" (Inch) Symbol Type 01 AC adapter (With AC cord*2) 02 AC adapter (Without AC cord) 03 Power supply cable (For 24 VDC wiring) N None Symbol Type 01 Standard nozzle 02 Bypass nozzle*3 *1 The AC adapter body and the power supply cable (For AC adapter) come as a set.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Inch-size One-touch fittings and NPT/NPTF/G threads are available.

3 Port Air Operated Valve

Nil V Standard For vacuum X505 VPA500 series Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF VPA700 series Specifications Fluid Air Type of actuation N.C. or N.O.

Process Pump

7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread