Integrated Controller

D-G

Micro Mechanical Valve Series VM1000

Hard steel roller VM121-01-01SA VM131-01-01SA VM121U-01-01SA VM131U-01-01SA VM123-M5-01SA VM133-M5-01SA 16 g One way roller lever Polyacetal roller VM121-01-02A VM131-01-02A VM121U-01-02A VM131U-01-02A VM123-M5-02A VM133-M5-02A 15 g Hard steel roller VM121-01-02SA VM131-01-02SA VM121U-01-02SA VM131U-01-02SA VM123-M5-02SA VM133-M5-02SA 20 g Straight plunger VM120-01-05A VM130-01-05A VM120U

CLQ

Calculation: (Example) CDLQD32-20DCM-B Basic weight : CLQA32-20D-453 g Additional weight: Magnet 64 g Rod end male thread43 g With rubber bumper 3 g Double clevis145 g Auto switch mounting nut Auto Switch Mounting Bracket Weight Mounting bracket part no.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Approx. 300 44.5 68.6 [75.6] 20 20 20 20 Pg7 127.2 [131.6] 107.6 [112] 22 22 22 22 147.2 Max. 10 145.4 110.6 125.4 97.6 65.6 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 56 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 01 02 Grommet (G),

CE

V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

CE

V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

7ND9071en

mA Fault current (FDE): 3.9 mA FOUNDATION fieldbus function block execution times ND9000F AO 20 ms AI 20 ms PID 20 ms DO 20 ms DI 15 ms IS 15 ms OS 15ms 7 ND90 71 en 7 Approvals Table 1 Approvals and electrical values, HART Certificate Approval Electrical values ATEX ND_X VTT 09 ATEX 033X VTT 09 ATEX 034X II 1G Ex ia IIC T6...T4 Ga II 1D Ex ta IIIC T90 C Da II 2 G Ex ib IIC T6...T4 Gb II

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

X Z Y m3 x g x X x m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

PF2A/PF2W

(Add 20 g for the types of analog output whether voltage or current output selected.)

High Vacuum Angle Valve

D-G

SMC

Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA

Series VQ Base Mounted Metal Seal/Rubber Seal

Flat cable connector assembly (Option) Note Ass'y No Cable length (L) 1.5m 3m 5m AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 Cable 20 core X 28AWG For other commercial connectors, use 20 pin type with strain relief made in conformity with MIL-C-83503. How to Order Manifold VV5Q 1 08 C6 1 N G Option Symbol Option Remains VQ1000 VQ2000 None Check valve for prevention of back press.

CRQ2

Form (mm) G H UX UZ M N D (g6) Size 20 30 40 8 21 50 65 15 10 11 75 18 12 10 24 57 13 84 20 15 11 27 64 15 2.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

•

M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!

VM

Twist selector (3 position) VM133-M5-35R/B/G/Y VM153-M5-35R/B/G/Y Panel mounting hole JIS Symbol 3 port 5 port 3-M5 x 0.8 Depth 4 R port (5 port only) 0.5 MPa supply 20 N F.O.F. 45 T.T. 5-6-19 18 2/3 Port Mechanical Valve Series VM200 Large flow capacity. A variety of actuator types.

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

T

Burst Pressure Characteristics Curve and Operating Pressure How to Order 5 TPS0604 B 20 4 Burst pressure (MPa) Tubing model Burst pressure 3 Color Length per roll Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20 m roll 100 m reel Symbol 20 100 Max. operating pressure 2 1 20 0 0 20 40 60 80 Operating temperature (C) 15-6-23 1 Miniature Tubing and Miniature Fittings Series

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N