Process Pump

Note) One of Nil, F or N is entered as thread symbol.

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Hydraulic

1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 123 Hydraulic Cylinders: Technical Data 2 Series CHA Stroke range limit charts: Bore sizes 40, 50, 63, 80 Symbol Mounting orientation Mounting orientation Mounting orientation Mounting orientation Symbol Symbol Symbol F F F F F F F F F F F F Bore size 40 Bore size 50 3000 2 4 8 9 3 7 2 4 3 7 5 2000 8 9 1 5 1 6

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Even if there is any change in the shape of the moving object, the changes in the f value of the cylinders pressing force are kept low, resulting in a stable pressing force.

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Without bracket R Port With bracket F ... ...

SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

PFxx-OMJ0005CN

Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Valve stations F: D-sub connector P: Flat cable connector (26 pins) Note Note Stations Stations Symbol 02 Symbol 02 2 stations 2 stations Note 1) Double wiring specification Double wiring specification ... ... ... ... ... 12 13 12 13 Connector mounting position 12 stations 12 stations 13 stations 13 stations Symbol D Mounting position Specified wiring Note 2) Specified wiring (up to 25 solenoids

VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported U-side end plate assembly !2 U-side end plate assembly part no.

Thermo-chiller/Rack Mount Type

For pipe thread type F , a G thread conversion fitting set is included.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

How to Order Manifold Example/Valve VV5QZ15 08 N7 N C T VQZ2150R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold 06C6C R Rc(PT) VV5QZ25 N NPT T NPTF F G(PF) External pilot specification. Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

When the zero cut-off function is set to 0, the flow rate display value starts from 0 L/min., but in conditions other than horizontal installation and supply pressure of 0.35 MPa, the output may not be 0 L/min. 13 E F G PF2M701/02/05 /10/50/11/21(-L) PF2M725(-L) Voltage output (0 to 10 V)*1 0 V 0.10 V 0.12 V 10 V Output Output C G D H B F A E 0 0 Min. value of Flow Zero cut-off Max. value

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

Electric Actuators

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) A 110 20 95 95 () () (150) A B A B 100 200 300 400 500 600 Stroke Model LG1H212SC-700-F-X10 LG1H212SC-800-F-X10 LG1H212SC-900-F-X10 LG1H212SC-1000-F-X10 LG1H212SC-1200-F-X10 Stroke Model LG1H212SC100-F-X10 LG1H212SC200-F-X10 LG1H212SC300-F-X10 LG1H212SC400-F-X10 LG1H212SC500-F-X10 LG1H212SC600-F-X10 580 680

Air Fittings & Tubing

F (inch) Part No.

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.1 to 1.0MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (