Size: 2 (ø15), Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: N (NPT), Port Size: 10A (3/8), Voltage: 3 (110VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor)

Size: 2 (ø15), Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: N (NPT), Port Size: 10A (3/8), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal)

Size: 2 (ø15), Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: N (NPT), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal)

Size: 2 (ø15), Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: N (NPT), Port Size: 15A (1/2), Voltage: 3 (110VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor)

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Grommet, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPTF, Port Size: 1/2, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 3/8, Voltage: 12VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 1/2, Voltage: 12VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 1/2, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 3/8, Voltage: 24VDC, Lead Wire: DIN Terminal, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 1/2, Voltage: 24VDC, Lead Wire: DIN Terminal, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 3/8, Voltage: 24VDC, Lead Wire: Conduit Terminal, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø15, Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 3/8, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

SQ1000/2000

B 10A (+) () 10B (+) () () COM (+) Note) Positive COM spec. Negative COM spec.

VFS

Body type Plug-in type VVFS3000-10A Non plug-in type Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

0.4

(Station 9) VV5Q11-09C6FU2 VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 Function Symbol Specifications DC AC Note) For CE-compliant models, DC-type only.

1

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring is double wiring (connected to SOL. a and SOL. b) regardless of number