Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

High Vacuum Angle Valve, XL Series

) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi

LEC-OM02704CN

CC-Link PC07() 5 51 5 5.6.11 DOG DOG (1) /(RYn6) RYn6 18 (RYnARYnERY(n2)3RY(n2)5) RYnARYnERY(n2)3RY(n2)5 (2) (RY(n2)A) RY(n2)A DOG PC02 9DOG PC03 5.6.1(2) DOG PD16 5.6.1(2)DOG PC04 DOG PC05 DOG PC06 Z 1 1 PC07 5 52 5 (2) /(RYn6) ON OFF 0 4 ms ON (RYn1) OFF 6ms ON (RYn2) OFF DOG 0r/min 3ms DOG ON (DOG) OFF ON (RXn2) OFF ON (RXnC) OFF ON (RXn3/ZP) OFF .

AC Servo Motor Driver (CC-Link Type)

If over a certain period of time in the state of the pressing position, an overload alarm (AL 50, AL 51) occurs for driver protection. (1) Devices, parameters Set the input devices and parameters as follows: Item Device/Parameter used Description Automatic/manual selection (RYn6) (MD0) Turn RYn6 ON.

OMR0031

Operation Examples and Procedures. 51 12.1 Return to origin example . 51 12.2 Positioning operation example. 52 3 - 12.3 Pushing operation example . 53 13.

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

in / 104 mm, Width: 2.01 in / 51 mm, Height: 2.01 in / 51 mm, Net Weight: .88 lbs. / .4 Kg

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

Applicable Auto Switch Model

(Tolerance 30%) 5.3-51 2 Color Indication Style with Diagnostic Output Solid State Switch/Rail Mounting D-F7LF (Latching Style) Applicable Actuator Series Grommet Series Bore size (mm) The output signal can be detected in an unsteady detecting area.

SMC Electronic Switch Series Variations

The deviation from the setpoint is +/ 1[kPa]. this means that the output can become energized anywhere between 49 to 51[kPa]. (Refer to the graph below.) Starting Finished Absorbed Absorbed Absorbed Absorbed A P1 Vacuum P2 51 50 49 51 Set value [kPa] 49 Effective area of pressure indication at 50[kPa].

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

51 Single 33 2 position 4 port Base mounted Double 47 (1) Closed center 1.2 (0.067) (For manifold use only) 54 50 Exhaust center 3 position Pressure center Note 1) In case of M5 and mounted on monifold base.

%silltr

51 51 52 52 52 53 54 54 55 23 23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

Speed Controller with Indicator

02-06 (S) 6 10.4 23.4 32.7 (32.8) AS221FS-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FS-02-06 (S) 6 1/4 17 (17.5) 13 13.3 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33) AS42l1FG-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7 42.3 40.7 37.1 35.5 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Brake mechanism added

ML2B Component parts Note Description Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Free-cutting steel Aluminum alloy Carbon steel Carbon steel Carbon steel Carbon steel Special friction material Material Carbon steel No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 No. 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51

Compact Hydraulic Cylinder

93 80 M16 x 2 132 6 22 11 100 20 25 98 28 57.5 89 26 17.5 depth 13.5 77 11 Rc3/8 112.5 100 M20 x 2.5 156 6.5 26 12 107 24 30 117 29 67.5 95 26 17.5 depth 13.5 94 11 Rc3/8 132.5 Rod end male threads (mm) H C D L K X Bore size (mm) 20 M8 x 1.25 15.5 10 23 8 18 32 M14 x 1.5 27 16 38.5 14 30 40 M14 x 1.5 27 16 38.5 14 30 M18 x 1.5 50 32 20 46 18 35 M18 x 1.5 63 32 20 46 18 35 M22 x 1.5 37 25 51

Cylinder

II NN I Rod end without '~uto switch illG i ;:xI I ~ 2.FC thread Bore size S z I With 'al:lw switch I wi (mm) 30 51 I 5st 2051 1551 I 20st ~ ~ H 5" 10" 10 st 1 15 51 i 30" P I 6 30.5 35.5 40.5 45.5 3 47.5 52.5 57.5 62.5 18.5 20 , 22. 10 30.5 35.5 40.5 1 45.5 65.5 55.5 1 3 i 50.5 55.5 1 60.5 ;:5:5 1 21 f 30.5 15 35.5 40.5 145.5 26.5 55.5 1 4 54.5 59.5 I 64.5 69.5 79.5 1 23 ~F .Ot ~ .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5