SYJ3000/5000/7000

[0.44] 0.44 0.41 [0.41] 0.41 0.34 0.12 0.37 0.54 0.19 0.19 M5 x 0.8 SYJ520--C6 fitting for 6) 0.38 [0.38] 0.36 0.11 [0.11] 0.11 84 126 92 82 3 position 0.41 [0.39] 0.23 [0.12] SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 81 (47) 100 (66) 102 (68) 142 (108) 51

VQ4000

VQ 4 1 0 0 5 Series Enclosure Terminal block box kit 4 VQ4000 Nil Dust tight VV5Q41-07C8T01 set VQ4100-52 sets VQ4200-52 sets VQ4300-51 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Stainless Steel One-touch Fittings Series KG

Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

Antistatic One-touch Fittings Series KA

51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 55 61 12 20.9 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 13 15 17 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJ312 SYJ322 SYJ332 SYJ342 SYJ352 SYJ314 SYJ324 SYJ334 SYJ344 SYJ354 SYJ313 SYJ323 SYJ333 SYJ343 SYJ353 2 position 0.9 (0.05) 5 Port Body ported type M3 0.5 50 54 3 position 59(33) 73(47) 61(35) 77(51) 2 position 5 Port Base mounted type (With sub-plate) 1.8 (0.1) Body ported type M5 0.8 76(50) 80(54) 3 position 33 47 35 51 2 position 4 Port Base mounted type For manifold use only Note1

AC Servo Motor Driver (Pulse input type)

(SeeLECSB Operation Manual (Simplified Edition), section 5.3.2 for uploading.) 51 - 5.8.2 To Load saved Parameters From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters are stored. Click Open.

AC Servo Motor Driver (CC-Link Type)

If over a certain period of time in the state of the pressing position, an overload alarm (AL 50, AL 51) occurs for driver protection. (1) Devices, parameters Set the input devices and parameters as follows: Item Device/Parameter used Description Automatic/manual selection (RYn6) (MD0) Turn RYn6 ON.

AC Servo Motor Driver (SSCNET Type)

Reverse rotation is indicated by a minus (-) sign. -9 to 9 pulse -51- No. Name Function Display range Unit 4 Cumulative command pulses The position command input pulses are counted and displayed. Press the [Clear] button to reset the display value to zero.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

1

This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.) Note: If the pressure switch allows an error of 1 [% F.S.], the output turns ON at 51 [kPa]. Taking the repeatability into account, the output turns ON at 50 to 52 [kPa] and, in the same way, the pressure display turns 50 [kPa] at 49 to 51 [kPa]. (Refer to the chart below.)

VHK

18 41 6 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-08F-01S VHKl-08F-02S VHKl-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 4 3 8 1 2 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-02S VHKl-10F-03S VHKl-10F-04S 74.8 78.2 44.3 47.7 51 68 17 19 72 70

XL

) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Adjusting width Adjusting width with angle adjusting screw A (90 at max) with angle adjusting screw B (90 at max) Rotation range of key groove 11-7-51

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Circumference divided in 6 equivalants (mm) E (g6) F (h9) M L K G D C B A Model A port B port CDRB2BWU10-S 4 9 10 0.5 9 3 14 45.5 15 29 CDRB2BWU15-S 5 12 15 0.5 10 4 18 47 20 34 CDRB2BWU15-D CDRB2BWU20-S 6 14 20 0.5 10 4.5 20 51 29 42 Rotary actuator CDRB2BWU20-D CDRB2BWU30-S A port B port 8 16 30 1 12 5 22 55.5 40 50 CDRB2BWU30-D Angle adjuster (34.5: Connector type) R Y P Model N Q 90 100

Compact and Lightweight

Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. Mounting Caution Caution ZK2 1.

MY2

However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600mm stroke, specify "-XB11" at the end of the model number. Refer to the Made to Order Specifications on page 33. Made to Order Specifications Refer to pages 33 through 35 for details.

Table of Contents

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Adjusting width Adjusting width with angle adjusting screw A (90 at max) with angle adjusting screw B (90 at max) Rotation range of key groove 11-7-51