Stations: 7 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 8 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 3 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 2 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 2 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 3 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 4 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 5 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 6 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 11 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 16 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Thermo-chiller

heat C [cal/(kgfC)] 41F (5C) 1.00 4.2 x 103 1.00 1 x 103 1.02 3.91 x 103 1.02 0.93 x 103 1.02 3.91 x 103 1.02 0.93 x 103 50 (10) 1.00 4.19 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.93 x 103 59 (15) 1.00 4.19 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.93 x 103 68 (20) 1.00 4.18 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.94 x 103 77 (25) 1.00 4.18 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.94

HRS100/150

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

energy saving effect

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

Air Slide Table

For lubrication, specialized grease GR-F is recommended.

Lightweight and Compact

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For auto switch mounting position and its mounting height, refer to page 7-6-103.

MY1

8 MY1HG-F (W) Component Parts Description Material Note No.

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2