Stations: 3 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 2 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 4 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 2 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 3 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 6 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 8 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 5 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 5 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 10 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 12 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

06-rear-e

Grease pack part no.: GR-S-010 (10 g) Scraper NBR Cushion seal Chromated NBR Magnetic shielding plate Clear anodized Rolled steel plate Switch rail 27 Aluminum alloy Magnet 28 Nickel plated Hexagon socket head cap screw 29 #0 Chromium steel Wear ring C Special resin 26 to 29 are non-replaceable parts, so they are not included in the seal kit. 163

Peltier-type Chiller Thermo-con/ Compact Type

Air 2 Peltier-type Chiller Thermo-con/Compact Type Air-cooled HEF Series Application Examples Cool Diode Laser Cool Optical Camera C-mount lens F-mount lens Microscope C-mount TV adapter Data analyzer Compatible with digital cameras Microscope Cooling Plate Laser Oscillator Cool Power Device Beam Bumper Cooling Glass Heat Exchanger Circulation Between Gas Generation Analyzer and Jacketed

e-Rodless Actuator

Reference formulae [Dynamic moment at impact] Use the following formulas to calculate dynamic moment when taking stopper impact into consideration. m : Load mass (kg) F : Load (N) FE: Load at acceleration and deceleration (N) a : Set acceleration (m/s2) : Set speed (mm/s) M : Static moment (Nm) FE = m a Nominal size Maximum load weight (kg) 16 5 25 10 L1 : Distance to the loads center of

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

VBA-OM-P018

VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT 4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F

VBA-OM-S006

VBAT10S-Y-4 () VBAT-U 30 1 1 VBA1 4 O VBA1 1 /VBAT5S-Y-4 1 1 / 1 VBAT-U 1 1 ( 3 ) VBAT-V1 () () / / VBAT-M46C / VBAT-M46 VBAT05S1-U-X104 2 OUT VBAT-M46C VBAT05S1-U-X104 VBAT10S1-U-X104 IN VBAT05S1-U-X104 VBAT10S1-U-X104 VBA1 VBA1/VBA2 VBA2 5.3kg 8kg 5L 10L OUT 3/8 1/2 TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150 337 370 307 163

Stations: 16 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: T (NPTF)

Stations: 15 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: T (NPTF)