One-touch Fittings Series KQ2

A D1 L1 L2 M D2 NPT 1 8 1 4 1 8 1 4 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 KQ2W01-34S KQ2W01-35S KQ2W03-34S KQ2W03-35S KQ2W05-34S KQ2W05-35S KQ2W07-34S KQ2W07-35S KQ2W07-36S KQ2W09-34S KQ2W09-35S KQ2W09-36S KQ2W11-35S KQ2W11-36S KQ2W11-37S KQ2W13-35S KQ2W13-36S KQ2W13-37S 37 38 42 38.5 42.5 40 43.5 43 47 49 47 51 53 59 61 65.5 63 64.5 69 15.5 2.5 19 41 19 41 41 19 20 42 69

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VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 Non-leak/ Medium vacuum 106 Pam3/sec or less Note) 1/8 (6A) Air 300 NBR, FKM 1 cm3/min or less Note) Value for V and M options (Non-leak/Medium vacuum) 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 0.45 0.33 3.0 4.5 2.3 0.46

Air Combination

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

Compact Cylinder with Lock Series CLQ

Type A mounting bracket part numberYA-03 JointYU-03 2 x O depth of counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part no.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 6 4 5 6 6.5 7.5 8 9 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 1 4 41 49 50 63 62 93 91 37.5 17 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 1 11 6 11 17 21 30 35 45 12 13 8 3 8 M12 1 46.2 39.5 17 16.2 19 19 14 3 8 10 M15 1 16 48.8 41.5 17 18.8 19 22 17 12 3 8 18 51.3 44.5 17 19.3 22 24 19 M17 1 Bulkhead union: KFE Applicable tube (mm) Effective orifice (mm 2) Mounting

KF

O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19

13

10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

Direct Operated

Max. system pressure (MPa) Flow characteristics C[dm3/(sbar)] 0.08 0.15 0.20 0.08 0.15 N.C. 1 0.7 0.3 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 1.2 1.6 0.6 1 0.3 0.5 Cv 0.32 0.25 0.20 0.32 0.25 b VX311-01 VX312-01 VX313-01 VX311-02 VX312-02 VX322-02 VX332-02 VX313-02 VX323-02 VX333-02 VX324-02 VX334-02 VX322-03 VX332-03 VX323-03 VX333-03 VX324-03 VX334-03 0.29 0.60 0.82 0.29 0.60 0.7 0.4 0.2 0.7 0.4

JXCx-OMT0061CN

- [] PLC RWw RWw bit 10.1.2 0 (2) [OUT]()[] (P.41) 1 ON OFF OFF 2 10.1.2 (2) [OUT]()[] (P.41) 3 4 5 0 6 ON ON *1 7 *1 8 *2 9 *1 *2 A *2 B (*1*2) C 17.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

0.4

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NP printing NP 16400DN Printed in Japan.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12

AS-FG/ASD-FG

41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11 55 17 27.8 39.3 12.8 6 17.9 3/8" 21 67 27.8 39.3 AS321FG-03-08 AS321FG-N03-07 57 18.5 29.5 41 15.2 8 13.2 1/4" 17 55 R(PT) 3/8 23 41.5 46.5 20.9 19 40.2 35.2 NPT 3/8 19 20.9 29.5 41 AS321FG-03-10 AS321FG-N03-09 59 21 31.8 43.3 18.5 10 15.2 5/16" 46.5 41.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41 8 17.9 43.3 21 67 18.5 57 29.5 3/8" 23 20.9 46.5 35.2 40.2 41.5 19 3/8 AS321F-03-07 AS321F-03-10 27.8 43.3 10 13.2 18.5 39.3 17 55 21 59 31.8 1/4" AS321F-03-09 AS321F-03-12 29.5 15.2 41 18.5 57 44.3 12 20.9 46.5 41.5 40.2 35.2 20.9 22 61 32.8 23 5/16" 3/8 AS321F-03-11

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2 41 21.3 48.3 AS321F-02-12 AS321F-02-11 12 3/8" 20.9 22 31.8 44.3 32.8 69 43.3 21 67 17.9 19 19 AS321F-03-06 AS321F-03-07 6 1/4" 12.8 17 27.8 39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2

7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

8 15.2 21.8 19 R 1/4 23 9.5 55.3 1.5 49.3 AS321F-N02-07ST AS321F-02-10ST 1/4" 13.2 27.8 39.3 17 21 31.8 43.3 10 18.5 AS321F-N02-09ST AS321F-02-12ST NPT 1/4 19 23 9.5 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 22 32.8 44.3 12 20.9 AS321F-N02-11ST AS321F-03-06ST 3/8" 17.9 31.8 43.3 21 17 27.8 39.3 6 12.8 AS321F-N03-07ST AS321F-03-08ST 1/4" 13.2 27.8 39.3 17 18.5 29.5 41 8 15.2 20.9 19 R 3/