Stability of suction position,

ZP3EA-YAL16 [Weight: 116.6 g] M16 x 1.5 Width across flats 22 Width across flats 19 M14 x 1 6 6 25 24.5 49.5 16 5 5 25 41 M5 x 0.8/ Effective thread depth 5 Rc1/8 14.5 9 9.9 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM 7 M10 x 1 M16 x 1.5 Applicable pad part no.

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

Modular Type Regulator Series AR

Note 6) Comes with T type handle. 41 Regulator AR20(K) to AR60(K) Made to Order Specifications Contact P/A for detailed dimensions, specifications, and lead times. e With Digital Pressure Switch Digital pressure switch (ISE30---L) is supplied loose for mounting on pressure gauge connection port.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

specification Dust seal specification TSUBAKI CABLEVEYOR specification Clean room specification (-X60) LJ1H 10/20/30 (Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101

MXW Series Long Stroke Slide Table

29 169 41 66 6 1 412 52 MXW20-175 140 237 128.5 50.5 194 66 91 6 1 462 48 MXW20-200 164 264 152 56 219 91 116 7 1 512 52 MXW20-225 189 288 177.5 73.5 244 116 141 7 1 562 48 48 MXW20-250 215 312 203 59 269 141 166 8 2 612 151 MXW Series Long Stroke Slide Table Dimensions MXW 25 Stroke: 100, 125, 150 Operating port 2-Rc (PT) 1/8 (mm) J 20 Width across hexagon socket hole 5 Scale:15% 11

5 Port Solenoid Valve SY Series

In common Type 60 SY3 60 Cassette type Individual wiring SY5 60 P. 59 R Size and weight reduced by eliminating the manifold base + + P SY7 60 Type 41 Compact bar stock type Individual wiring SY3 40 SY5 40 + + + + P. 79 The base mounting facilitates maintenance after valves are changed.

VCB

66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

VCB

66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class

Vacuum

Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .

15

V = 1.4 x Va V = 1.4 x 200 V = 280 mm/s M1E = 1/3 x FE x Z = 1/3 x 150.9 x 101/1000 = 5.1 [Nm] (A) m x g (z) 3A = M1E/M1max = 5.1/12.1 = 0.42 Z M1 FE Find the value of M1Emax when Va = 280 mm/s from Graph (11) c. Va Examine M3E.

SFOD-OMT0009CN

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

AC Servo Motor Driver (CC-Link Type)

Changing PD06 from 002B to 0006 0 6 -41- (2) Symbol allocation using the setup software: Changing pins CN6-2 from Proximity dog (DOG) to Clear (CR). Change PD06 from 002B to 0006 in the I/O settings tab. Click on the "Single Axis Write" button. Cycle the power off, then on for the parametersto be enabled. 002B 0006 Please allocate pins CN6-2 separately.

IDX-OM-W017

-3 6.5mm ()M3 0.61Nm 2-2-5 IDFA Series 2 3 IDX-OM-W017 2 2 3 () 2 2 () 2-3 IDFA Series 2 4 IDX-OM-W017 3 / 3 3 1 INOUT 3 2 ON IDFA3E() IDFA4E15E() INOUT 5 ONOFF 0.15MPa NO IN IDFA Series 3-1 3 1 IDX-OM-W017 3 / 3 3 OFF OFF 3 4 3 3 5 3 5 OFF 3 6 24H OFF IDFA Series 3-3 3 2 IDX-OM-W017 4 4 4 1 5 10 4 2 4-2-1 () 4-2-2 1. 100 2 () 100 T 4-2-3 4-1 41

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type 10-SS3YJ5-41-C6 C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M39 x 1.5 31.5 M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M48 x 1.5 40 H+0.4 +0.1 D M5 x 0.8 M6 x 1.0 76 60 41

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1