Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

KJ

5.7 21 3 8 Connection thread 6.35 6.5 21 7.94 8 22 20 1 2 9.53 9.6 22 21.3 Reference dimensions after NPT thread installation.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB DBT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 -X BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Speed Controller with One-touch Fittings Series AS In-line Type 1

-08 21 34.1 39.1 8.2 64.4 15.2 8 18 19.8 31 31.5 36.5 8.1 59.8 15.2 18 5/16" AS2051F-09 AS3001F-10 32 35.6 40.6 9.8 71.6 18.5 10 21 42 33.3 38.3 7.4 59 13.2 17 1/4" AS3001F-07 AS3001F-12 33 36.8 41.8 11 76 20.9 12 22 19.8 46 34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

9 D20 to 63 80, 100 -X @7 y w 20Data 40 to 100 80, 100 With rod end locking (Base cylinder only) Since the guide unit figure is the same as the standard type, refer to pages 8-21-19 to 8-21-21. Component Parts Zinc chromated For lock type Material Note Material No. Description No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L d m t l IY-G012 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NTJ-015A NT-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 5 for axis M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 14.6 16.6 21 25.6 41.6 50.6 64 72 4.8 4.8 7.6 9.6 9.6 13.4 17 21 10.2 12.2

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 12.7 12.5 33.7 30.7 56.3 52.1 92.9 87.6 153.8 145.5 21 21.5 25.5 26 16 17 17 18.5 17 18.5 18.5 21 21 22 M5 x 0.8 11.2 28.3 8 13 9 25.5 25 22.2 R 1/8 14.7 33.9 36.4 12 15.5 14.6 26.6 31.4 32.4 27.4 R 1/4 17.7 38.5 40.8 17 15.5 19.5 28.7 35.8 34.8 29.8 32.7

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

MGG

115 25 103 55 94 194 164 182 Rc 1/4 25 58 M10 x 1.5 depth 21 With rod side locking With head side locking For locking type For non-locking type Bore size (mm) Bore size (mm) Z X W Bore size (mm) HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 37 25.3 157 30 40 20 25 32 40 50 12 (14) 21 47.5 107 (115) 11 104 40 28.3 175 37 46 12 (14) 21 48 107 (115) 11 104 43 31.3 201 37 52 12 (14) 21 49

SYJ300/500/700

21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions with connector cable. 4-4-23 24 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve

0.4

SOL.A 17 16 () (+) 21 25 24 Gray Red 23 Station 11 13 3 SOL.B () (+) 22 18 23 Black White 24 SOL.A 12 4 () (+) 23 26 Station 12 White None 25 19 22 SOL.B () (+) 24 11 5 21 20 White None 26 COM. 10 9 8 7 6 (+) () 25 COM. M27 female thread (+) () 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

21 21 21 44.5 44.5 44.5 44.5 Refer to page 646 for dimensions with connector cable. 619 Series 10-SYJ500 Manifold Specifications [Option] Directional Control Valves Air Grippers Modular F.