Air Slide Table Series MXP 5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.
w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.
Base material: Aluminum Fluid: Air VXE2 VXED2 VXEZ2 Common SUP Individual SUP u u w w t e t e y r q y r o o q y i y i IN OUT OUT port IN port Base material: Brass (C37), Stainless steel Fluid: Water/Oil Common SUP u w t e y r o q y OUT i IN port Component Parts Material No.
Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.
Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.
Required w Low adhesion Required w Low adhesion Not required (Except CJ2X and CUX10) Not required Not required q q qr 1 Consider using the smooth cylinder. 2 Consider using the low speed cylinder (new model). 3 Consider using the low speed cylinder (conventional model). 4 Consider using the low friction cylinder 5 Consider using the standard non-lube cylinder 6 Consult with SMC.
Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q
Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component
9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.
9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.
9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !
Working Principle Diagram Power supply and error LED indication Power supply Output signal r Control circuit Input signal P e Pressure sensor w Exhaust solenoid valve q Air supply solenoid valve SUP EXH OUT Block Diagram Supply pressure q Air supply solenoid valve Output pressure Input signal + r Control circuit w Exhaust solenoid valve Discharged to atmosphere e Pressure sensor 808 Compact
IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
Body material: C37, Stainless steel w VX2 q VXK e VXD r VXZ Component Parts VXS VXS t No.
3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.