MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

02 E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425 to 935 Adapter assembly port size (2 pcs.)

HRX-OM-Q026

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

Lubrication Equipment

AL How to Order ALD600 ALD 20 B 9 00 S1 Float switch Style None ALD ALDU D.P. Lube (Single unit) D.P.

VSA4

(Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 43 Series SYJ5000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ5-20PStations -00 For (Built-in one-touch fitting) N3 N7 C4 C6 Manual override L1 L2 M5 x 0.8 (A, B port)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Type 42 (5 Port/Base mounted) How to Order SS5YJ742 05 C6 Applicable interface regulator ARBYJ7000-00-P Thread type A, B port size Stations C6 Nil F N T 02 Rc G NPT NPTF One-touch fitting for 6 2 stations + + P port 1/4 C8 : One-touch fitting for 8 : B R P R N7 20 One-touch fitting for 1/4" 20 stations A, B port A N9 One-touch fitting for 5/16" R port 1/4 B Note) For more than stations,

Modular Type Filter Regulator Series AW

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa Inlet pressure MPa AW40 AW20 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 58 AW10 to 40

Air Pilot Operated Series NVSA

(mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

AC Servo Motor Driver (CC-Link Type)

Please select the station 00, if you want to use for the first time.

Vacuum

Air Operating pressure -6 -3oinHq C150 760mmHq) Applicable adsorption nozzle diamelr (smil) 00.G00.7 (re'er 10 grapn 1)l 00.5^01.2 (rete'to oraph 2l Hystaresis 0.'

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

VY511, VYU5

VY1200-00-N VEX3222-5M Description E-P HYREG valve 3 position valve No. q w VE VY Exclusive controller VYU5-D G Rotary switch, Trimmer container 4-4.5 AL STOP START SEL. SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR.

Vacuum

Air Operating pressure -6 -3oinHq C150 760mmHq) Applicable adsorption nozzle diamelr (smil) 00.G00.7 (re'er 10 grapn 1)l 00.5^01.2 (rete'to oraph 2l Hystaresis 0.'

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port. 611 3 Port Pilot Solenoid Valve 10-SYJ300 Type 20 Manifold: Top Ported/10-SS3YJ3-20Stations -00

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

HRX-OM-M090

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-R016

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-W038

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.