E H L M Min. port size W LQ1U1A 1/8" 10 29 11.5 1.8 10 LQ1U2A 1/4" 15 14 41 16.5 3.6 14 LQ1U2B 3/16" 2.9 LQ1U2C 1/8" 1.8 LQ1U3A 3/8" 20 17 54 23 5.8 19 LQ1U3B 1/4" 3.6 LQ1U4A 1/2" 24 21 63 28 9 23 LQ1U4B 3/8" 5.8 LQ1U5A 3/4" 29 26 77 39 15 32 LQ1U5B 1/2" 9 LQ1U6A 1" 39.5 36 102 49 21.2 46 LQ1U6B 3/4" 15 25 1 Class 6 (E) shows the approximate dimension of the inserted tubing from the end
Page 102 . Page 103 HED qPiping Conversion Fitting . Page 113 Air-cooled 200 V wCaster Adjuster-foot Kit . Page 113 Water-cooled 200 V HEA eElectric Conductivity Control Set . Page 114 Air-cooled 400 V IDH rBypass Piping Set . Page 114 Water-cooled 400 V Cooling Capacity. Page 104 tRelief Valve Set . Page 115 Pump Capacity . Page 105 ySnow Protection Hood . Page 116 Dimensions .
Station L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 612 3 Port Pilot Solenoid Valve 10-SYJ300 Type 41 Manifold: Side Ported/10-SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type S41 Manifold: Side Ported
The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air 1.5 MPa Proof pressure Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)
PROFIsafe (Acknowledgement) . 99 17.A . 100 18.BF. 102 19.Ci. 103 20.DPROFIsafe . 104 21.E . 105 22.F . 109 23.GEX245-FPS . 110 24.H. 111 3 No.EX##-OMY0006CN 1. *2) *1) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines
L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD
10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1 DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1
C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114
2AREA AREA1 2 [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 40 0 [%] f 170[mm] 2100[mm] AREAON 40[%] INPON 2[mm] j 1[mm] j AREA ON OFF ON INP OFF 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 -26- 3 INC a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50
. / . 100 16.2 . 101 16.3 . 102 16.4 . 102 16.5 . 103 16.6 . 103 16.7. . 103 17. . 104 17.1 . 104 17.2 . 107 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 -4No.JXC-OMT0001CN-C JXC93 Series 1. 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic
CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13
. 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102
G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102
(Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102
27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102
GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20 7.5 10 11.5 17.5 22 25 22 24 32 32 40 40 30 35 40 45 45 55 G1/8 G1/8 G1/4 G1/4 G1/4 G1/4 83 91 104.5 119.5 150 170 32 40 50 63 80 100 12 12 15 12 18 20 27 27 31.5 31.5 38 38 54 63 75 90 102
+ Stroke 55 6 Hole: 10H8 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 R12 Width across flats 36 Shaft: 10d9 0.040 0.076 +0.022 0 Hole: 10H8 12 +0.5 +0.2 169 + Stroke 102 + Stroke 55 6 12 26 41.2 49 Note) Refer to pages 13
(D) Q2B20075DC M18 x 215 l M18 x 225 l 215 225 C (D) Q2B180-100DC C (D) Q2B200-100DC 3 Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102
The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of
The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of