CNA

16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 2035 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up

CNA

16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PL PW S FV FD FT FX FY FZ Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105 59 130 58 254 58 52 17.5 66 1/4 stroke 262 80 17 M22 x 1.5 37 1/2 55 15 23

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

Table of Contents

Tentative determination of L type (For intermediate stops, refer to page 8-15-52.) (Refer to page 8-31-1.)

IDG

state (AMH) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 100 200 300 400 0 400 800 1200 1600 0 Inlet air flow rate

Series IDG

(AFM, AFD) 0.12 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa Pressure drop MPa Pressure drop MPa 0.10 0.06 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.06 0.04 0.04 0.02 0.02 0 80 160 240 200 400 600 800 0 Inlet air flow rate l/min (ANR) Inlet air flow rate l/min (ANR) IDG75M, 75V (standard dew point 20C (4F)) IDG75HM, 75HV

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500

5

Installed state Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) Current foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 25 44 19 38 57 29 48 19 38 57 36 62 26 52 78 40 66 26 52 78 A 45 71 26 52 78 Current model 52 78 26 52 78 64 95 31 62 93 77 113 36 72 108 98 140 42 84 126 117 162 45 90 135

1

Dimensions Double acting, Single rod Single acting, Spring return Single acting, Spring extend Z + Stroke H + Stroke Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action F H F H Without switch With switch Without switch With switch Without switch With switch Bore size (mm) 5 10 15 5 10 15 5 10 15 5 10 15 6 8 9 42 42 9 8 47 52 57 47 52 57 52 62 67 52 62 67

ISO Cylinder

C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Rod flange: Cl85Nl lG (With mounting bracket) Standard (W) FT Head flange: Cl85Nl lG (With mounting bracket) UF TF (WL + Stroke) FT UR FB [mm] Bore size FBH13 FT TF UF UR (W) (WL) 8 4.5 3.2 30 40 22 12.8 65.2 10 4.5 3.2 30 40 22 12.8 65.2 (72.2) 12 5.5 4 40 52 30 18 76 (80) 16 5.5 4 40 52 30 18 82 20 6.6 5 50 66 40 19 91 25 6.6 5 50

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

R (NPT) Port size A N L2 L2 LQ2L21-M LQ2L22-M LQ2L23-M LQ2L24-M LQ2L31-M LQ2L32-M LQ2L33-M LQ2L34-M LQ2L35-M LQ2L36-M LQ2L41-M LQ2L42-M LQ2L43-M LQ2L44-M LQ2L51-M LQ2L52-M LQ2L53-M LQ2L54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 (A) 1/4 1/8" 20.5 (M) (M) 38 19.9 19 24 18 VC 1/4" 18 H (E) VDW L1 43 Class 2, 3 1/4" 22 42.5 VQ 26.2 22 28 24 43 3/8" 21.5 VX2 42.5 52 51 52 51 59 58 59

CL

64 78 92 115 128 144 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 69 78 84 92 100 141.5 150 167 16 20 20 25 30 36 36 40 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x

Free Mount Cylinder

67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products

CQS

29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 A + Stroke LS + Stroke CUJ Bore size (mm) L Y X LZ LY LX LT LH LG L1 LD CU 12 16 20 25 4.5 5 5.8 5.8 8 8 9.2 10.7 44 48 62 66 29.5 33.5 42 46 34 38 48 52

V100

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.