Sine Cylinder Series REC

41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

Sine Cylinder Series REC

41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5

CP95

60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25 12 16 18 35 5 6.6 55 11 5.5 50 46.5 15 27 16 21 20 40 5 51 9 65 15 6.5 63 56.5 15 32 16 21 23 45 5 9 75 15 6.5 80 72 18 36 20 25 27 45 5 11 95 18 10 100 89 18 41 20 25 30 55

CP95

60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25 12 16 18 35 5 6.6 55 11 5.5 50 46.5 15 27 16 21 20 40 5 51 9 65 15 6.5 63 56.5 15 32 16 21 23 45 5 9 75 15 6.5 80 72 18 36 20 25 27 45 5 11 95 18 10 100 89 18 41 20 25 30 55

CNS

135 + 55 125 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n (Same side) n = 4, 8, 12, 16 2 (Different sides, Same side), 1 155 35 145 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 155 + 55 35 + 55 145 + 55 n (Same side) n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 Different sides 110 35 Same side 110 100 D-A3 D-G39 D-K39 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) Courtesy of Steven

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 Size Motor type FA FB FC FD FE FF FG FH FK NZ, NW, NU, NT M5 x 0.8 10 70 50 3.5 67.7 78 22.5 50 63 NY M4 x 0.7 8 70 50 3.5 67.7 78 22.5 50 NX M5 x 0.8 10 63 40 3.5 72.7 78 27.5 55 NV M4 x 0.7 10 63 40 3.5 72.7 78 27.5 55

MB1

3.2 3.6 4.5 4.5 32 38 46 56 72 89 53 59 50 162 132 55 170 72.5 148 70 190 When there is no air cushion, the unit is equipped with rubber bumpers.

V100

For body ported models with the external pilot option, please refer to page 4-4-55.

LEC-OM07605CN

E9]OFF MR Configurator 91 91.1 (1) 55 LECSS2T 55 55 (2) (2) 92 92.1 (1) LECSS2T (2) (2) DC3.1V DC3.1V (3) (3) 92.3 (1) DC3.1V DC3.0V (2) (2) 8 50 8. 95 STO STOOFF 95.1 STO1 (1) STO1 STO1OFF OFF STO1ON LECSS2-T OFF 1) 50r/min 2) 50mm/s 3) 5r/min 95.2 STO2 (1) STO2 STO2OFF OFF STO2ON OFF 1) 50r/min 2) 50mm/s 3) 5r/min 96 96.1 (1) INP( LECSS2-T ) ON 96.2 (1) (2) (2) 9F 9F

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

•

M Dllferent surfaces 35 301" 2) 110 + 30(n 2) D-A44 l< + (" = 2. 4. 6. 8.. ) o ~_+-_+-~L-_+ :: Same surface 55 55(" 2) 110 "t' 50(n 2) !i I + (" = 2. 4. 6. 8 .. ) With I pc. 15 "0 With 2 pes.

ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y 4 4 Connection 1.6 thread 29 B D 6 15 10 94 40 43 15 99 45 25 109 55 63 37 02 1.2 Width across flats 12 A N S U F GN GS 6 63 37 15 10 94 40 43 15 99 45 25 109 55 N4 N6 U4 U6 J K ZP Y U 04 A8 1.6 Width across flats 7 6 63 37 15 10 94 40 43 15 99 45 25 109 55 06 08 2.5 F 17.5 Dimensions Per Vacuum Inlet C2 Model E F Fitting part

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-55-1B(-Q) SY5000-55-1B(-Q) SY7000-55-1B(-Q) Applicable series Applicable series 10-SY3000 10-SY3000 10-SY5000 10-SY5000 10-SY7000 10-SY7000 One-touch fitting (Inch size) One-touch fitting (Inch size) Port size 5/16" One-touch fitting 3/8" One-touch fitting 3/8" One-touch fitting Assembly part no.

smcmaintenancepartslist

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

CG1

(67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55 4.5 6 125 101 100 28.5 30 188.5 (202.5) 197.5 (211.5) +l CJP 60 (74) 65 150 121 120 192 (206) 201 (215) +l Note) ( ): Long stroke CJ2 Flange (mm) CM2 Stroke range Rear flange ZZ Bore (mm) FT FD FX F E B C85 Without rod boot With rod boot Front Rear 20 25 32

Profile Design ISO/VDMA Air Cylinder Series CP95

ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11 5.5 5 50 46.5 15 27 16 21 20 40 10 9 65 15 6.5 5 51 19 63 56.5 15 32 16 21 23 45 12 9 75 15 6.5 5 80 72 18 36 20 25 27 45 14 11 95 18 10 5 100 89 18 41 20 25 30 55 16 11 115 18 10 5 1.8-11 Series

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

70astamb1

32 38 46 56 72 89 50 162 Up to 700 53 132 55 170 Up to 800 59 In the case of w/o air cushion, it comes with rubber bumper.