AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

4 600 LEFS32lll-550l 745 556 680 10 4 600 LEFS32lll-600l 795 606 730 10 4 600 LEFS32lll-650l 845 656 780 12 5 750 LEFS32lll-700l 895 706 830 12 5 750 LEFS32lll-750l 945 756 880 12 5 750 LEFS32lll-800l 995 806 930 14 6 900 LEFS32lll-850l 1045 856 980 14 6 900 LEFS32lll-900l 1095 906 1030 14 6 900 LEFS32lll-950l 1145 956 1080 16 7 1050 LEFS32lll-1000l 1195 1006 1130 16 7 1050 LC3F2 Note 1)

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

LEC-OM02704CN

12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15

MXQ

MXQ8-30 MXQ8-30 MXQ8-50 MXQ8-50 MXQ8-50 MXQ8-50 0.01 MXQ8-50 MXQ8-50 MXQ8-10 0.02 MXQ8-10 MXQ8-10 0 40 80 120 0 0 20 40 60 20 40 60 Load (N) Load (N) Load (N) 12 12 12 Lr = 90 mm MXQ12-30 MXQ12-30 MXQ12-20 MXQ12-20 MXQ12-10 MXQ12-10 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 MXQ12-30 MXQ12-20 MXQ12-10 MXQ12-100 MXQ12-100 0.10 Table displacement amount (mm) Table displacement amount (mm) Table

C76

46.8 57.9 7 10 96 129 97 122 9 12 97 122 12 0.032 0.059 42.5 58.2 72.3 6-10-16 6-10-16 17 Series C76 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Accessory Dimensions [First angle projection] Single Knuckle Joint/DIN648 Double Knuckle Joint/DIN71751 CJ1 CJP CJ2 CM2 CG1 MB (mm) (mm) MB1 Thread e M10 x 1.5 M12 x 1.75 b 10 12 d 40 48 f 10 12 g 18 23 c 20 24 j 12 15

C76

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB (mm) (mm) MB1 a 20 24 j 12 15 c 20 24 g 18 23 f 10 12 d 40 48 b 10 12 Thread e M10 x 1.5 M12 x 1.75 0 l3 14 16 Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating

Rotary Actuator/Vane Type

10-(18-X) to (X-4) X-4 3 to 18 10-(18-X) to (X-1.5) X-1.5 20 10 to 20 10-(20-X) to (X-4.5) X-4.5 3 to 20 10-(20-X) to (X-1.5) X-1.5 30 10 to 22 12-(22-X) to (X-5) X-5 5 to 22 12-(22-X) to (X-2) X-2 87 CRB2 Series Axial: Top (Long shaft side) Axial: Bottom (Short shaft side) Symbol: A14 Symbol: A15 Applicable to single vane type only.

SV

One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 Rc 1/4 Rc 3/8 G 1/4 G 3/8 One-touch fitting for 8 (up to 18 solenoids possible.) 18 18 stations SV1000 Type 16: Series SV2000 One-touch fitting for 10 Note Symbol 02 Stations 2 stations SV2000 Double wiring specifications (1) One-touch fitting for 12 SV3000 12 02 12 stations 2 stations Specified layout (2) One-touch

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

4.5 7 142 144 32 64 7 50 79 16 10 130 45 26 26 10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 45 90 9 70 110 25 12 155 60 32 32 12 15 12 170 80 80 50 50 12 5.5 10 185 190 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16

CL

6 6 8 TD 8 9 9 10 TT 10 10 10 11 TY 32 40 40 53 TX 32 40 40 53 TZ 52 60 60 77 Z 173 187 189 Bore 20 25 32 40 PW S 127 1/8 1/8 1/8 1/4 38 M10 X 1.25 41 41 137 139 167 M10 X 1.25 M14 X 1.5 222.5 41 Integrated Clevis (E) CLM2E Bore size Stroke (mm) A 18 22 22 24 BP BQ BZ 57.5 69 69 76 D 8 10 12 14 GB 8 8 8 11 BC 38 45 45 52 AL 15.5 19.5 19.5 21 CD 8 8 10 10 BN 80 90 90 B1 13 17 17 22 CX 12 12

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

Speed Controller with Indicator

6 1/4 17 13 13.3 10.4 21.8 33 36.4 63.1 61.7 54.6 53.2 24.5 28.5 9.3 19.2 55 AS321FS-G02-08 8 13.2 22.7 33.9 14.2 AS321FS-G02-10 10 15.9 26.7 37.9 35.7 15.6 57 AS321FS-G02-12 12 18.5 29.7 40.9 34.5 17 59 AS321FS-G03-06 6 1/4 21 16.6 45 AS321FS-G03-08 8 13.2 22.7 33.9 14.2 46 AS321FS-G03-10 10 15.9 26.7 37.9 28 15.6 47 AS321FS-G03-12 12 18.5 29.7 40.9 26.8 17 49 AS421FS-G04-10 10 1/2 27 15.9

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

42

Bottom 1/2 SYJ S kit 12 stations SZ n: Stations VF Flow Rate Characteristics at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 C [dm3/(sbar)] 11 11 11 VQ 1/2 1 4/2 (P A/B) b 0.24 0.24 0.24 2-position metal seal VQ51 2 00 Cv 2.7 2.7 2.7 VQ 4/5 VQ 4/5 C [dm3/(sbar)] 12 12 12 b 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) VQC 1/2 Cv

Table of Contents

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0 0.043 0.004 0.012 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0 0.043 0.004 0.012 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

REA/REB

10 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 130 11 60 100 10 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 120 160 70 9.2 12 11.5 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25 47.5 17 M10 x 1.5 190 10.5 90 140 12 15 136 9.2 Rc 1/4 M10 x 1.5 M8 x 1.25 M20 x 1.5 14 56 PA dimensions are for split from center.

REA/REB

ST) 3 10 (1.5 1.3 x 103 x ST) 10 (1.71 1.3 x 103 x ST) = Max. load weight (kg) 3 7 12 20 30 50 7 12 Stroke (Max.)