SMC Corporation of America
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T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

Tightening torque for piping Body class Torque (Nm) 2 3 4 5 6 1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 5.5 to 6.0 17-5-66 5 Series LVQ Integral Fitting Type (Hyper Fittings) Construction Double acting type N.O. type Basic type N.C. type PB PB q q q VC PA PA VDW e e e VQ VX2 A B A B SMC SMC VX A A B A B B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

'/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

)IF115.2kbps 2 4.2(CN2SW) TM (CN2SW) Deviceet TM(CN2SW) Deviceet () PC/TB(CN2)(LEC-T1-)(LEC-W2)(LEC) TM(LEC) (CN2SW)Deviceet 15 - 4.3(LEC) (LEC)(LEC-T1-) (LEC-W2)(LEC) (LEC)(LEC)(LEC-T1-) 4.3.1 ID 2(LEC)ID (LEC)IDID112 ID (LEC-W2) Normal Parameter Controller ID () Download (IDID ) 4.3.2 IF(LEC)(LEC-T1) IF115.2kbps (LEC-W2) Normal HELP-Password 16 - Para protectComm speed -1 Para protect

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

: T1 (-100 to 100 KPa), Option: MR (Plug for Individual Supply, Blocking the Air Supply Passage to D Side + w/Manual Override for Residual Pressure Release)

: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]

: T1 (-100 to 100 KPa), Option: EM (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Plug for Individual Supply, Blocking the Air Supply Passage to D Side)

: T1 (-100 to 100 KPa), Option: EMR (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Plug for Individual Supply, Blocking the Air Supply Passage to D Side + w/Manual Override for Residual Pressure Relea

: T1 (-100 to 100 KPa), Option: EY (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Vacuum "V" port Release to Atmosphere Type, Check Valve: 1 pc)

: T1 (-100 to 100 KPa), Option: ER (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + w/Manual Override for Residual Pressure Release)

: T1 (-100 to 100 KPa), Option: MY (Plug for Individual Supply, Blocking the Air Supply Passage to D Side + Vacuum "V" port Release to Atmosphere Type, Check Valve: 1 pc)

: T1 (-100 to 100 KPa), Option: EMY (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Plug for Individual Supply, Blocking the Air Supply Passage to D Side + Vacuum "V" port Release to Atmosphere Type, C