SMC Corporation of America
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Detection nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3

0 !1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

+0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 11 Series MDNB Auto Switch Specifications Applicable

(For manifold type 20) Body ported 5 L SYJ5 2 M5 1 0 2 5 0 L SYJ5 4 Base mounted Thread type Rc G NPT NPTF Nil F N T Body option Coil specifications Manual override Nil Standard With power saving circuit <24 V, 12 VDC only> 0: Pilot valve individual exhaust for the pilot valve Nil: Non-locking push type T Power saving circuit is not available in the case of D, DO or W type.

to 10 V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA EX600-AMB Max. rated input signal 22 mA Note 2) 15 V 250 100 k Input impedance 0.05% F .S.

S. ) 4095] H EX O ut put pressure 0% F. S. 100% F. S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) A pressure of 0. 3M Pa i s set by sendi ng i nput dat a of 999 t o t he el ect ropneum at i c regul at or t hrough t he m ast er PLC. Com m uni cat i on dat a al l ocat i on For "1" t he num ber of t he st at i on.

0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC60 AC30 0.25 0.25 Set point Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.15 0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC40 0.25 Set point Outlet pressure MPa 0.2 0.15 0 0 0.2

The ZX is a single-stage vacuum generator. The modular design allows the user to choose only the components needed for the application. The ZX is available with a combination of generator unit, supply/release valve unit, pressure switch unit, and suction filter unit. Order without the generator unit for use as a filter and valve assembly for house vacuum systems. Special function plates

Main Body Shape: Unit, Additional Function: Silencers / Valves for Vacuum Generation / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50~, Suction Flow(l/min): 22, Nozzle Diameter: 1.0mm, Exhaust specifications

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destruction Support / Central Exhaust Specification, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Operating Temperature Range(°C): 5:50~, Suction Flow(l/min): 22, Nozzle Diameter: 1.0mm, Exhaust

Nozzle Diameter: ø1.3, Exhaust: Silencer, Valve: Supply Valve: Solenoid (NC)/Release Valve: Nil, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: -, Manual Override: -, Switch: -, Lead Wire: -, Mounting Style: -

Nozzle Diameter: ø0.7, Exhaust: Silencer, Valve: Supply Valve: Solenoid (NC)/Release Valve: Nil, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: -, Manual Override: -, Switch: -, Lead Wire: -, Mounting Style: -

Nozzle Diameter: ø0.5, Exhaust: Silencer, Valve: Supply Valve: Solenoid (NC)/Release Valve: Nil, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: -, Manual Override: -, Switch: -, Lead Wire: -, Mounting Style: -

Nozzle Diameter: ø1.0, Exhaust: Silencer, Valve: Supply Valve: Solenoid (NC)/Release Valve: Nil, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: -, Manual Override: -, Switch: -, Lead Wire: -, Mounting Style: -

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

9, @0, @1 Seal kit includes !9, @0, @1.

1 #2 i @9 w $1 #1 #0 @7 CY1L10 to 40 @2 #9 @0 $0 t !4 !5 !9 #5 $2 #8 !2 !0 !6 !7 @4 @1 !8 @8 $1 #6 #7 F Enlarged view F 10,15 $1 @3 @5 @6 e y r q #2 !3 !1 o i u w #1 @7 #0 10 Parts list Parts list No. Description Slide block No.

Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 Z + Stroke S + Stroke 1.5 27 2 CLK1GB: 19.5 40 57 97 ZZ + Stroke Approx.

0.05 E 0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0. 1 C0. 1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 10 (12) 6 201 to 350 20 to 200 4 to 200 38 18 15.5 13 93 1/8