CM2

TZ TY TX TT TD Q P WB N1 G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 36 52 32 32 10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16 21.5 15 32.5 6-4-34 35 Series CDM2W Air Cylinder: Standard

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

CNG

10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) 20 25 32 40 K KA MM NA PG PH PL S FD FT FX FY FZ XA XB P I J l ZZ H e f h ZZ 26 35 178 (186) 30 22 55 198 (206) 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 5.5 6 52 25 65 3 12

Cylinder with Lock Series CNG

25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BF BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 15.5 18 13 38 38 93 1/8 44.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 to 200 20 to 200 19.5 22 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 to 300 20 to 300 19.5 22 17 45 45 104 1/8 51.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 to 300 20 to 300 27 30 19 52 52 112 1/8

C95

Bore size (mm) C76 GKM10-20 40 10 20 20 10 + 0.50 + 0.15 32 52 M10 x 1.25 GKM12-24 48 12 24 24 + 0.50 + 0.15 40 62 12 M12 x 1.25 C85 GKM16-32 64 16 32 32 + 0.50 + 0.15 50, 63 83 16 M16 x 1.5 + 0.60 + 0.15 M20 x 1.5 GKM20-40 80, 100 105 40 40 20 80 20 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data d3 Part no. d1H9 h d6 max. b1h12 l min. a l3 Bore size (mm) 32 KJ10D 10

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50, 63 80, 100 125 GKM10-20 GKM12-24 GKM16-32 GKM20-40 GKM30-54 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 M10 x 1.25 10 40 10 10 52 20 20 12 12 62 M12 x 1.25 12 48 24 24 16 16 83 M16 x 1.5 16 64 32 32 M20 x 1.5 20 80 20 20 105 40 40 M27 x 2 30 110 30 30 148 54 55 Piston Rod Ball Joint KJ (ISO 8139) l l3 d6 (Max.) l d3 b1 h12 h d1 H9 l3 Part no.

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

MNB

10 14 18 18 22 26 19.5 27 32 32 37 37 Up to 500 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 1/8 1/8 1/4 1/4 1/4 1/4 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13

MNB

10 14 18 18 22 26 19.5 27 32 32 37 37 Up to 500 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 1/8 1/8 1/4 1/4 1/4 1/4 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Air Cylinder

) 63 40 20 78 72 24 10.5 170 (182) 80 52 10 80 59 191 (205) 100 62 7 80 71 191 (205) 1/4 stroke * The minimum stroke with rod boot is 20 mm.

7

2 x Speed controller valve Top width across flats 3 20 17 30 45 W 10 45 14 11.5 3 M16 x 1.5 45 Hs 30 IA IB 40 35 20 38 Width across flats 17 4 x M6 Thread depth 12 F R15 0.050 d90.093 +0.027 H8 0 Shaft: 12 Hole: 12 97 78 + Stroke 190 + Stroke Clevis width CKG1A: 16.5 CKG1B: 19.5 CKG1C: 12.5 Unit: mm +0.3 0 +0.4 0 +0.5 0 Symbol F IA IB N S W Hs Bore size 40 50 63 45.5 5 53 52 47 52 44 40

CM2

25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A

REA/REB

/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)

REA/REB

N N Z + Stroke REAS15 (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 REAS25 10 11 6.5 26.4 16 8 14 4 7 8.5 70 54 40 20 REAS32 12.5 14 8 33.6 20 8 16 5 7 9.5 86 66 46 24 REAS40 12.5 14 8 41.6 25 10 20 5 10 10.5 104 76 57 25 HP HS HT J x K L LD M MM N NN Model REAS15 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5

SX

-05DRS-C6 20 20 stations For special specifications, indicate separately by the manifold specification sheet.

F

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !

3 Port Air Operated Valve Series SYJA300 1

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

MNB

104 38 16 13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/4 100

KJ

(inch) H (Width across flats) Mounting plate thickness 11 mm or less Connection thread Min. port size Connection thread UNF L Mounting hole Weight (g) M Model 2-Applicable tubing KQ2E01-00 KQ2E03-00 KQ2E05-00 KQ2E07-00 KQ2E09-00 KQ2E11-00 KQ2E13-00 1 8 1 2 17.46 32.5 32.5 34 34.5 38 42.5 44.5 13.5 13.5 15 15 20 23 26 26 26 33 33 52 70 97 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 -20