Valve Single Unit

4/2 5/3 (A/B EA/EB) Flow characteristics Port size Weight (g) Valve model Type of actuation Grommet L plug connector M plug connector 62 63 70 72 1, 5, 3 (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Single Double 2 position 0.18 0.45 0.64 0.16 0.44 0.61 0.13 0.43 0.47 0.13 0.46 0.48 Closed center Exhaust center Pressure center Single Double Closed center SX320--M5 M5

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Basic type / Direct mount type Series CY3B/CY3R

Model CYV15 CYV32 1 5 (Nm) M1 0.3 3 M1 M2 M2 0.6 4 M3 0.3 3 Model CYV15 CYV32 m m Moment generated by the workpiece weight even when the cylinder is stopped Static Moment M Pitch moment M1 = m x g x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) A 16.5 27.0 B 25.5 48.0 Model CYV15 CYV32 L B L B L A M1, 2, 3: Moment [Nm] m: Load mass [kg

Rotary Actuator

port B port A port B port M 30 30 M5 15.5 14 5.5 (Standard) (Altered) 40 40 M5 21 20 5.5 (Viewed from the long shaft side) Symbol: C4 Applicable to single vane type only Symbol: C3 The position of the screws for tightening the actuator body is changed.

CV/MVGQ

Mounted Cylinder Single Acting, Spring Return/Extend Series CVJ3 Single Acting, Spring Extend/Basic Style (B) CVJ3B T Bore size Stroke 28 [34.5] 48 [49] M5 x 0.8 M5 x 0.8 Manual override Width across flats B1 M5 x 0.8 RE A B REC 16 [17] S + Stroke H + Stroke Z + 2 x Stroke Rod End Nut CX Bore size (mm) 10 16 H1 B1 CY 7 3.2 8 4 MQQ M [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st

CV/MVGQ

CVJ3B T Bore size Stroke 28 [34.5] 48 [49] M5 x 0.8 M5 x 0.8 Manual override Width across flats B1 M5 x 0.8 RE A B REC 16 [17] S + Stroke H + Stroke Z + 2 x Stroke Rod End Nut CX Bore size (mm) 10 16 H1 B1 CY 7 3.2 8 4 MQQ M [ ]: Denotes the values of AC.

Dual Rod Cylinder Series CXSJ/CXS

x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 556 Series CXSJ Dual Rod Cylinder Compact Type Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) A H E F (Through) N N (I ) (L) (Z) (G) C CX2 NN CXW A B ZZ C D E M F G H I J K L N 2 x M4 x 0.7 with thread depth 6 2 x M4 x 0.7 with thread depth 6 2 x M5 x 0.8 with thread depth 7.5

ZP3

UM e Connection thread (Male thread) Width across flats D M5 x 0.8 A5 M5 x 0.8 B 3 A Model A B C2 D Vacuum inlet direction q Pad dia.

Table of Contents

B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For monifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

Table of Contents

A Series VFR2000 Rc1 8 Thread type T0604 x 1 m B Plug-in VFR2000 LP 02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11 12 Series

CG5-S

R V Basic type (B)/CG5BAS : With air cushion WA WB GA GB 2-P W 10 H1 Width across flats B1 M BM Max.

A

M3) AN120-M5 (M5) AN110-01 (1 8 PT) AN101-01 (1 8 PT) D I M E N S I O N S SERIES NAN SILENCER S Y M B O L S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R1 P 13 5 10 10 14 14 5-M5 0.8 (Piping port) 15 [ ] for AC L type plug connector (L) : SYJ3140L -M5 M type plug connector (M) : SYJ3140M -M5 33.5 33.5 23.2 (Mounting holes) 22 4 23.2 (Mounting holes) 22 4 B A B A 11 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 About 300 52.6 [59.1] About 300 54.7 [56] (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2

A

I P P L E F O R H6 ...6 X4 M M I/D T U B E H4 ... 4 X2.5 M M I/D T U B E +1.0 -0 Stroke Tolerance Rod End Thread Male Thread / Without Thread Mounting Method Panel Mount type Plug Mount kit as accessory P I S T O N R O D T H R E A D With B Without D I M E N S I O N S R E C O M M E N D E D M O U N T I N G H O L E D I M E N S I O N S F O R P L U G M O U N T Bore size (mm) Stroke A B C D E

5

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

Free Mount Cylinder

8] 2-P through Seal washer Vacuum port size Socket (Only 16) M5 x 0.8 d Through d Through d through Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 GA A' B C d D E F FK FL FY GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4