SYJ3000/5000/7000

Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

CQ2

Standard Bore (mm) Stroke range (mm) (mm) Q N M J F I E K2 G H K1 Th9 B C D L P W Z A 0 0.043 0 0.052 5 to 30 12 15 3.5 10 32 25 5 1.5 5.2 6 6 3.5 37.2 30.2 M3 X 0.5 15.5 M5 X 0.8 15 5 to 30 16 15 3.5 38 31 20 10 38 29 6 1.5 6 8 8 3.5 M4 X 0.7 M5 X 0.8 20 0 0.043 0 0.043 5 to 50 20 5.5 25.5 17.5 43 34 9.5 47 36 8 2 8 7 10 4.5 M5 X 0.8 M5 X 0.8 13 5 to 50 25 5.5 28 19 47 37 11 52

Metal Seal/Rubber Seal Series VQ Body Ported

B B B B B B B 2n-C3, C4, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 M5: M5 thread SMC P = 10.5 18.4 6 (7.5) Grommet The broken lines indicate the DIN rail mounting style [-D].

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

CRB2/CRBU2/CRB1

B C D R Model 31 45.5 14 M5 x 0.8 CDRBU2WU10-D 25 47 18 M5 x 0.8 CDRBU2WU15-D 34.5 51 20 M5 x 0.8 CDRBU2WU20-D 47.5 55.5 22 M5 x 0.8 CDRBU2WU30-D 52 Rotary Actuator with Angle Adjuster Free-Mounting Type Series CDRBU2WU Dimensions: 40 (with Angle Adjuster and Auto Switch Unit) Single vane/Double vane type CDRBU2WU40-S, D h Keyway dimensions L b h (h9) L b (h9) Model 52 64 0 0.030 4 20 0 0.030

Table of Contents

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Reference figure 136 Base Mounted 10-SY3000/5000/7000 Type 41P 10-SY3000: 10-SS5Y3-41PStations -M5, C4, N3 C6, N7 [ ]: AC For M5 x 0.8 One-touch fitting (Pitch) 15 P = 12.5 7 (Pitch) : 6, 1/4" Applicable tubing O.D.: 4, 5/32" (A, B port) 15 P = 12.5 7 (A, B port) M5 x 0.8 6.5 20.7 6.5 20.7 B B B B A A A A L2 L1 4 + 13.6 8.5 + + (3.2) (For mounting) 4 x 4.5 50 5.6 2.9 82.1 [84.3] 117.1 [121.5

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

20 5 15 20 15 B B B B 5 VP4 1.5 2n-M5 X 0.8 (Pitch) P=10.5 15.5 1.5 2n-One-touch fitting (A, B port) (A, B port) 15.7 (Pitch) P=10.5 Applicable tube: T0425 VQ Other dimensions are the same as the M5.

0.4

DIN rail clamp screw 8 R R 11.5 63.5 62.5 56.6 3 3 X X 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.5 7.5 9.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 one-touch fitting C8 [1(P) SUP port] C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6

Table of Contents

Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104