Multistage Ejector

Vacuum Pressure Gauge Specifications 22 - Document No.ZL-OM01001-A Digital Vacuum Pressure Switch Specifications CE/UKCA, RoHS compliant A Note 1) If the applied voltage fluctuates around the set value, the hysteresis must be set to a value more than the fluctuating width, otherwise chattering will occur.

Vacuum Pad with Ejector

Specification 22 12. Circuit examples 24 13. Exhaust Characteristics and Flow Characteristics of Ejector 25 14. Troubleshooting 26 15. Non-conformance Examples 27 1 - 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

AIR FILTER

Element assembly Snap fit Two places Pull up Element Baffle Bowl assembly 22 AF20A Step 1 Step 2 The element is attached to the deflector, and fixed into position in the direction shown. When the element assembly is attached to the bowl assembly, the snap fit of the deflector is attached to the bowl assembly.

Fluoropolymer Piping Equipment

(mm) Connection tubing size TLM TILM Standard size 3.0 4.0 6.0 8.0 10.0 12.0 19.0 25.0 3.18 4.75 6.35 9.53 12.7 19.0 25.4 31.75 38.1 Tolerance Standard size Tolerance 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" 1 1/4" x 1.1" 1 1/2" x 1.33" 0.06 0.5 TD TID +0.2 0.1 Metric sizes TH TIH 0.1 1.0 a

PVC Quick Drain Valve

diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model LVW60 LVW80 LVW90 Nominal diameter 80A 40A 65A 32A 50A 25A Applicable pipe size external diameter 89 48 75 38 60 32 Operating pressure 0 to 0.02 MPa Orifice size 80 65 25 40 Pilot pressure 0.3 to 0.5 MPa Kv 169.7 43.7 131.1 18.8 71.1 8.5 Flow rate characteristics Cv 198 51 153 22

06-cx2-e

Contents Model CX2N10-PS CX2N15-PS CX2N25-PS CX2N10 CX2N15 CX2N25 CX2N10-PS CX2N15-PS CX2N25-PS @0 @1 22 @3 Rod seal Set of left nos. @0, @1, @3 22 is a non-replaceable part, so it is not included in the seal kit. Piston seal NBR Piston gasket Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size. (The piston gasket @2 is not replaceable.)

06-cxwm-e

Contents Model @0 @1 22 @3 NBR Cylinder body Rod seal 22 is a non-replaceable part, so it is not included in the seal kit. NBR CXWM10-PS Piston seal CXWM10 CXWM16 CXWM25 CXWM10-PS CXWM16-PS CXWM25-PS Set of left nos. @0, @1, @3 CXWM16-PS NBR Piston gasket CXWM25-PS NBR Cylinder tube gasket Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size.

06-mgz-e

Contents Bore size (mm) MGZ20-PS 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS @0 21 Rod seal A MGZ25-PS Rod seal B 21, 22, 23 and 24 are non-replaceable parts, so they are not included in the seal kit.

06-rec-e

When re-tightening, tighten approximately 2 degrees more than the original position. 16, 18 and 22 are non-replaceable parts, so they are not included in the seal kit. 174

Digital Gap Checker

distance range 0.01 to 0.03 mm 0.02 to 0.15 mm 0.05 to 0.30 mm Displayable/Settable range (Distance reference) *1 0 to 60 *4 10 to 300 *4 30 to 500 *4 Minimum display unit (Distance reference) *1 1 Rated pressure range 100 to 200 kPa Displayable range (Pressure value) *2 20 to 220 kPa Withstand pressure 600 kPa Detection nozzle 1.5 *3 Consumption flow rate 5 L/min or less 12 L/min or less 22

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Pulse Valve

Tightening Torque for Piping Size Wrench tightening angle Tightening torque 1 (25A) 10 to 15 50 to 100 Nm Procedure for installing the valve on the tank Connection thread Proper tightening torque [Nm] Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/2 40 to 42 5.

INFORMATION Step Motor Controller 5 types of communication protocols New New

Version 1.1 Port Class A Communication speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22

Residual Pressure Release Valve

release push button (Red) VCHC D With One-touch fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22

KT10

Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200 psig (8.2 MPa) 2250 psig (15.5 MPa) 3750 psig (25.8 MPa) 6000 psig (41.4 MPa) 9000 psig (62.1 MPa) 15000 psig (103 MPa) 2000 psig (13.8 MPa) 3200 psig (22

Dedicated Controller

Over speed 22 The controller exceeded the maximum operational speed. Abnormal driver temperature 24 A temperature increase of the driver unit activated the temperature sensor. Encoder error 25 An encoder or actuator cable malfunction has occurred. Abnormal drive current 26 The driver unit power supply is shut off due to a regeneration problem, etc.

Fieldbus System

End Plate Model EX245-EA2-1 EX245-EA2-2 Bracket Yes No Weight 200 g 150 g EX245-EA24 EX245 Series Dimensions SI Unit End Plate EX245-SPN1 EX245-EA2-1 120 6.5 14 22.1 28.6 6.6 5.6 98.8 148.5 133.5 61.5 1.6 6 85 10 EX245-EA2-2 37 18 120 14 61.5 44 50 130 23 35 Digital Input Module Digital Output Module EX245-DY1 EX245-DX1 22 22 27 13.5 61 120 120 81 27 54 54 61 5 Fieldbus System: For Input/

Suction Filter with Case FH99 Series

M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1/2B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 2B 250 140 115 218 150 60 90 77.8 42.9 42.9 77.8 21.5 10 21.5 2B 2 1/2B M16 x 2 Thread depth 34 M16 x 2 Thread

33

Circulating fluid weight volume ratio g Circulating fluid (volume) flow rate qv Circulating fluid specific heat C Circulating fluid outlet temperature T1 Circulating fluid return temperature T2 Circulating fluid temperature difference iT Conversion factor: hours to minutes Conversion factor: kcal/h to kW : (= r x qv x 60) [kgf/h] : 1 [kgf/L] : 10 [L/min] : 1.0 x 103 [cal/(kgfC)] : 20 [C] : 22

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive