Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: R (Flow Direction: Right to Left), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

Process Pump

-Calculation of life of diaphragm (depending on operating conditions) 0.054L (amount discharge per cycle) Referential life date (days) = x 50 million cycles (reference number of cycles in service life) Flow (L/min) x Operating time per day (hour) x 60 (min) The volume inside pump (wetted part) is about 105mL. 4) Pilot air Confirm the supplied pilot air is within specified range from 0.2 to

Process Pump

-Calculation of life of diaphragm (depending on operating conditions) 50 million cycles (reference number of cycles in service life) Referential life date (days) = Operating frequency of solenoid valve (Hz) x 60 (sec) x Operating time per day (hour) x 60 (min) The discharge amount per one cycle is about 0.050L when there is no piping resistance.

HEC_W-E

Remove these screws Remove these screws Fig. 3-2 Foot mounting screws 2) Then tighten M5 screws (bolts) or equivalent into 4 holes sized to 7mm on the parts marked with arrow for mounting.

High Vacuum L Type Valve

MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

High Vacuum L Type Valve

1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013-B 3-2.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Port size M5 RC1/8 Weight kg 0.45 1.1 Note1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.