Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

Process Pump

-Calculation of life of diaphragm (depending on operating conditions) 0.054L (amount discharge per cycle) Referential life date (days) = x 50 million cycles (reference number of cycles in service life) Flow (L/min) x Operating time per day (hour) x 60 (min) The volume inside pump (wetted part) is about 105mL. 4) Pilot air Confirm the supplied pilot air is within specified range from 0.2 to

Process Pump

-Calculation of life of diaphragm (depending on operating conditions) 50 million cycles (reference number of cycles in service life) Referential life date (days) = Operating frequency of solenoid valve (Hz) x 60 (sec) x Operating time per day (hour) x 60 (min) The discharge amount per one cycle is about 0.050L when there is no piping resistance.

HEC_W-E

Remove these screws Remove these screws Fig. 3-2 Foot mounting screws 2) Then tighten M5 screws (bolts) or equivalent into 4 holes sized to 7mm on the parts marked with arrow for mounting.

High Vacuum L Type Valve

MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

High Vacuum L Type Valve

1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013-B 3-2.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Port size M5 RC1/8 Weight kg 0.45 1.1 Note1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

MHx-OMZ0003

Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1. JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

High Vacuum L Type Valve

to 8 2.5 to 11 4 to 18 4 to 18 6.5 to31.5 6.5 to 31.5 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM

XLG Series

1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside

TA301

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR 2-M5 x 0.8 depth 7 (Mounting screw) VH VHS Dimensions/Manifold VVTA300-1 VVTA300-3 (Pitch) Max. 2 Max. 2 Pilot port Pilot port 4-M4 (Mounting hole) (Mounting hole) 4-M4 (P port) (Pitch) (P , R port) (R port) (A port) (A port) Individual Exhaust Common

MHR2/MDHR2

X 0.8 M3 X 0.5 Repeatability Air Fluid 0.2 to 0.6 MPa Operating pressure 0.15 to 0.6 MPa JIS Symbol Ambient and fluid temperature 180 c.p.m Max. operating frequency Lubrication Non-lube Note 1) Refer to page 494 Effective Gripping Force for details of Gripping force at each gripping point.

VY511, VYU5

READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Individual -X Technical data 1099