Fieldbus system EtherNet/IP compatible SI Unit

(Ch0&1 in) Monitor under range 0: disable, 1: enable 0: offset binary 1: signed magnitude 2: 2s complement 6..7 Data format Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0

Table of Contents

Refer to page 5 and 8. 4 Model determination Refer to page 2. Refer to page 5. 5 Selecting accessories sold separately.

Stability of suction position,

/With Male Thread Adapter: Vacuum Inlet Lateral Pad form Bellows type with groove ZP3E-Y32BMl-AL14 ZP3E-Y40BMl-AL14 ZP3E-Y50BMl-AL14 M14 x 1 Width across flats 19 Width across flats 19 M14 x 1 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10

Table of Contents

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(Pitch) P = 10 12.8 34.3 23.6 32.1 15.4 15.6 3/5 3/5 3/5 2 2 2 2 2 2 2 30.6 46.2 54.5 1 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting (PE: Pilot EXH port) Applicable tubing O.D: 4, 5/32" 20.5 6.2 One-touch fitting

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 RE A B Auto switch model Applicable load PLC Relay, PLC REC Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA CX Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

CQS

16; 5 stroke, 20; 5 to 15 stroke, 25; 5 to 10 stroke, 20 with auto switch built-in magnet; 5 stroke.

CRB2/CRBU2/CRB1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW 50 CRB1LW 63 CRB1LW 80 CRB1LW100 Connector, Without lead wire CN Notes) Connectors are available only for auto switch types D-R73, D-R80, D-T79.

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 CL Auto switch model Applicable load PLC Relay, PLC CL1 Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MLGC Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less (

Solid State Auto Switches

5 mA) 100 A or less at 24 VDC Current leakage Operating range .

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 CJ1 Auto switch model Applicable load PLC Relay, PLC CJP Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA CJ2 Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less (

Air Fittings & Tubing

(inch) Model Style 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 10-32UNF NPT NPT NPT NPT 10-32UNF NPT NPT NPT NPT 3 16 5 32 Hex. socket head male connector Triple universal male elbow 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 Different dia. union "Y" KQ2U KQ2S KQ2VT 1 4 5 16 3 8 1 2 Double branch universal male elbow 10-32UNF NPT NPT NPT NPT NPT NPT NPT

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143