240

3.5 0 0.5 1 1.5 2 2.5 3 3.5 Pitch moment Mp (Nm) Yaw moment My (Nm) MXH20 MXH20 0.6 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 60 50 40 60 50 40 Displacement (mm) 0.5 0.4 25,30 25,30 15,20 5,10 0.3 15,20 5,10 0.2 0.1 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Pitch moment Mp (Nm) Yaw moment My (Nm) Design Caution D1.

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

CLS

Brake piston Locking spring Air pressure Eccentric cam shaft Brake shoe holder Locked state (When air is exhausted) Unlocked state (When air is supplied) 9-9-10 11 Series CLS Cylinder with Lock Double Acting, Single Rod Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !

Multi-Axis Step Motor Controller

3 !4 r t y u i !5 !6 No.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without silencer) Box type: Type B Body ported

rep-filter-e

When 2 to 3 elements are placed on top of the other, a set in which the element and joint are prepared can be mounted to the element support. 3-5. Assemble the element mounting bracket. 3-6. Mount the element retainer carefully. 4. Mounting of O-ring and Cover 4-1. Set O-ring to the case 4-2.

Industrial Filters Replacement Procedure

When 2 to 3 elements are placed on top of the other, a set in which the element and joint are prepared can be mounted to the element support. 3-5. Assemble the element mounting bracket. 3-6. Mount the element retainer carefully. 4. Mounting of O-ring and Cover 4-1. Set O-ring to the case 4-2.

CE

0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

High Vacuum Angle Valve

Replacement Heaters Temperature specification Valve size 100 160 H4 (100C heater) XLA25-60S-2 (2 sets) XLA25-60S-2 (3 sets) H5 (120C heater) XLA25-60S-2 (3 sets) XLA25-60S-2 (4 sets) Example) For the XLm-100H5-X152 with a heater, 3 sets of the XLA25-60S-2 are required. 6 Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use

MXH

6 8 4.8 6 6 8 8-2-6 5 Series MXH Specific Product Precautions 3 Be sure to read before handling.

CJ5-S

6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5

CJ5-S

6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Brake mechanism added

4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 35 (n 2) (n = 2, 3, 4, ) (Different surfaces) D-A44C n 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 55 + 50 (n 2) (n = 2, 3, 4, ) (Same surface) 1 10 75 80 90 2 (Different surfaces, Same surface) 1 15

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 47.5 2(A) 2(A) 13.5 Rc 3/8 (A port) Stations L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 10 359 344 9 326 311 8 293 278 7 260 245 6 227 212 5 194 179 4 161 146 3 128 113 2 95 80 : With light/surge voltage suppressor ( ): Dimensions for external pilot Individual exhaust: VV3P5-42Stations 3-03 28.5 3(R) 3(R) Rc 3/8 (G) (E) (T) (D, Y) (R port) N.C. N.O.

Title not found

for maniicld mountinq CE marked 0.1s high speed response 3 CE marked DeviceNet compatible 4.5. 6. 8. 14 CE marked lA"o.amLt@g 3. 5. 7. 10 CE marked digital iiffifre 3 . 5 . 6 . 1